Wen Zhu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,700,486
- Issue date Apr 20, 2010
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi step ebeam process for modifying dielectric materials
- Patent number 7,588,803
- Issue date Sep 15, 2009
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a low-K dual damascene interconnect structure
- Patent number 7,435,685
- Issue date Oct 14, 2008
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a low-K dual damascene interconnect structure
- Patent number 7,132,369
- Issue date Nov 7, 2006
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,115,508
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a low k dielectric film (K>3.5) for h...
- Patent number 6,699,784
- Issue date Mar 2, 2004
- Applied Materials Inc.
- Li-Qun Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING A LOW-K DUAL DAMASCENE INTERCONNECT STRUCTURE
- Publication number 20080145998
- Publication date Jun 19, 2008
- Applied Materials, Inc.
- GERARDO A. DELGADINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS
- Publication number 20060219175
- Publication date Oct 5, 2006
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi step ebeam process for modifying dielectric materials
- Publication number 20060171653
- Publication date Aug 3, 2006
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxide-like seasoning for dielectric low k films
- Publication number 20050227499
- Publication date Oct 13, 2005
- APPLIED MATERIALS, INC.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming a low-K dual damascene interconnect structure
- Publication number 20040157453
- Publication date Aug 12, 2004
- APPLIED MATERIALS, INC.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for curing low dielectric constant film by electron beam
- Publication number 20040101632
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Wen H. Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reacting an organosilicon compound with an oxidizing gas to form an...
- Publication number 20030211244
- Publication date Nov 13, 2003
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Crosslink cyclo-siloxane compound with linear bridging group to for...
- Publication number 20030194495
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for depositing a low k dielectric film (k<3.5) for hard mask...
- Publication number 20030113995
- Publication date Jun 19, 2003
- APPLIED MATERIALS, INC.
- Li-Qun Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Oxide-like seasoning for dielectric low k films

Multi step ebeam process for modifying dielectric materials

Method of forming a low-K dual damascene interconnect structure

Method of forming a low-K dual damascene interconnect structure

Oxide-like seasoning for dielectric low k films

Method for depositing a low k dielectric film (K&#x0003E;3.5) for h...

Patents Applicationslast 30 patents

METHOD OF FORMING A LOW-K DUAL DAMASCENE INTERCONNECT STRUCTURE

OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS

Multi step ebeam process for modifying dielectric materials

Oxide-like seasoning for dielectric low k films

Method of forming a low-K dual damascene interconnect structure

Method for curing low dielectric constant film by electron beam

Reacting an organosilicon compound with an oxidizing gas to form an...

Crosslink cyclo-siloxane compound with linear bridging group to for...

Method for depositing a low k dielectric film (k<3.5) for hard mask...

Method for depositing a low k dielectric film (K>3.5) for h...