Wenbo YAN

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for low temperature silicon nitride films
- Patent number 11,017,997
- Issue date May 25, 2021
- Applied Materials, Inc.
- Wenbo Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature silicon oxide atomic layer deposition technology
- Patent number 10,170,298
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Wenbo Yan
- G05 - CONTROLLING REGULATING
Information Patent Grant
High temperature silicon oxide atomic layer deposition technology
- Patent number 9,875,888
- Issue date Jan 23, 2018
- Applied Materials, Inc.
- Wenbo Yan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Accurate film thickness control in gap-fill technology
- Patent number 9,297,073
- Issue date Mar 29, 2016
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods And Apparatus For Low Temperature Silicon Nitride Films
- Publication number 20210265157
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Wenbo Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Selective Deposition of Dielectric Films
- Publication number 20210043448
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR LOW TEMPERATURE SILICON NITRIDE FILMS
- Publication number 20190348271
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Wenbo Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method And Apparatus For Selective Deposition Of Dielectric Films
- Publication number 20180211833
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Silicon Oxide Atomic Layer Deposition Technology
- Publication number 20180076023
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Wenbo Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Silicon Oxide Atomic Layer Deposition Technology
- Publication number 20160099143
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- Wenbo Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCURATE FILM THICKNESS CONTROL IN GAP-FILL TECHNOLOGY
- Publication number 20150299856
- Publication date Oct 22, 2015
- Applied Materials, Inc.
- Ning LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Methods and apparatus for low temperature silicon nitride films

High temperature silicon oxide atomic layer deposition technology

High temperature silicon oxide atomic layer deposition technology

Accurate film thickness control in gap-fill technology

Patents Applicationslast 30 patents

Methods And Apparatus For Low Temperature Silicon Nitride Films

Method and Apparatus for Selective Deposition of Dielectric Films

METHODS AND APPARATUS FOR LOW TEMPERATURE SILICON NITRIDE FILMS

Method And Apparatus For Selective Deposition Of Dielectric Films

High Temperature Silicon Oxide Atomic Layer Deposition Technology

High Temperature Silicon Oxide Atomic Layer Deposition Technology

ACCURATE FILM THICKNESS CONTROL IN GAP-FILL TECHNOLOGY