Wendell Glen BOYD JR.

Person

Morgan Hill, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with real time force and film stress control
- Patent number 11,915,913
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods, systems, and apparatus for conducting chucking operations...
- Patent number 11,854,911
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber component with protective ceramic coating containing yttriu...
- Patent number 11,769,683
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 11,699,611
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with real time force and film stress control
- Patent number 11,676,802
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing jig assembly for a new or refurbished electrostatic chuck
- Patent number 11,648,639
- Issue date May 16, 2023
- Applied Materials, Inc.
- William Ming-ye Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 11,476,146
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of polishing a new or a refurbished electrostatic chuck
- Patent number 11,260,498
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- William Ming-ye Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate chucking and dechucking methods
- Patent number 11,114,326
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ESC substrate support with chucking force control
- Patent number 11,114,327
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for direct measurement of chucking force on an...
- Patent number 11,054,317
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Charles G. Potter
- G01 - MEASURING TESTING
Information Patent Grant
Substrate support with real time force and film stress control
- Patent number 10,879,046
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Wendell Glen Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bond protection around porous plugs
- Patent number 10,847,402
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Apparatus, systems, and methods for temperature control of substrat...
- Patent number 10,736,182
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 10,679,885
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Polishing of electrostatic substrate support geometries
- Patent number 10,654,147
- Issue date May 19, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate distance monitoring
- Patent number 10,648,788
- Issue date May 12, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a substrate support assembly
- Patent number 10,557,202
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Wendell Glen Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real time monitoring with closed loop chucking force control
- Patent number 10,460,916
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixilated cooling, temperature controlled substrate support assembly
- Patent number 10,403,534
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to remove residual charge on a electrostatic chuck during th...
- Patent number 10,347,522
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Wendell Glen Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
- Patent number 10,121,688
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Matthew J. Busche
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 10,020,218
- Issue date Jul 10, 2018
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Temperature control apparatus including groove-routed optical fiber...
- Patent number 9,986,598
- Issue date May 29, 2018
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control systems employing deflection sensors to control clamping fo...
- Patent number 9,875,923
- Issue date Jan 23, 2018
- Applied Materials, Inc.
- Wendell Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixelated capacitance controlled ESC
- Patent number 9,805,965
- Issue date Oct 31, 2017
- Applied Materials, Inc.
- Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature control apparatus including optical fiber hea...
- Patent number 9,698,041
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
- Patent number 9,622,375
- Issue date Apr 11, 2017
- Applied Materials, Inc.
- Matthew J. Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a substrate support assembly
- Patent number 9,580,806
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Wendell Glen Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
- Publication number 20240258075
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20230326780
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
- Publication number 20230253188
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR ELECTROSTATIC CHUCK CERAMIC SURFACING
- Publication number 20230238267
- Publication date Jul 27, 2023
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING CHUCKING OPERATIONS...
- Publication number 20220270936
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20220270907
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER COMPONENT WITH PROTECTIVE CERAMIC COATING CONTAINING YTTRIU...
- Publication number 20220254672
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Wendell Glenn Boyd
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polishing jig assembley for a new or refurbished electrostatic chuck
- Publication number 20220088743
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- William Ming-ye LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL
- Publication number 20220005723
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
- Publication number 20210066038
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20200243368
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...
- Publication number 20200194290
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DIRECT MEASUREMENT OF CHUCKING FORCE ON AN...
- Publication number 20200103294
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Charles G. Potter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOND PROTECTION AROUND POROUS PLUGS
- Publication number 20190304827
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SUBSTRATE CHUCKING AND DECHUCKING METHODS
- Publication number 20190206712
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP SOFT POLISHING OF ELECTROSTATIC SUBSTRATE SUPPORT GEOMETRIES
- Publication number 20190111541
- Publication date Apr 18, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- B24 - GRINDING POLISHING
Information Patent Application
SOFT CHUCKING AND DECHUCKING FOR ELECTROSTATIC CHUCKING SUBSTRATE S...
- Publication number 20190080949
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ESC SUBSTRATE SUPPORT WITH CHUCKING FORCE CONTROL
- Publication number 20190067070
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL
- Publication number 20180330926
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20180301364
- Publication date Oct 18, 2018
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEW REPAIR METHOD FOR ELECTROSTATIC CHUCK
- Publication number 20180166311
- Publication date Jun 14, 2018
- Applied Materials, Inc.
- Wendell Glen BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DISTANCE MONITORING
- Publication number 20170350688
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Wendell Glenn BOYD
- G01 - MEASURING TESTING
Information Patent Application
METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...
- Publication number 20170263487
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
- Publication number 20170213754
- Publication date Jul 27, 2017
- Matthew J. Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20170167018
- Publication date Jun 15, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20170140970
- Publication date May 18, 2017
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
PIXELATED CAPACITANCE CONTROLLED ESC
- Publication number 20170110358
- Publication date Apr 20, 2017
- Applied Materials, Inc.
- S. M. Reza SADJADI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
- Publication number 20170103911
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Wendell BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
- Publication number 20170076915
- Publication date Mar 16, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- H01 - BASIC ELECTRIC ELEMENTS

Wendell Glen BOYD JR.

Person

Patents Grantslast 30 patents

Forming mesas on an electrostatic chuck

Substrate support with real time force and film stress control

Methods, systems, and apparatus for conducting chucking operations...

Chamber component with protective ceramic coating containing yttriu...

Forming mesas on an electrostatic chuck

Substrate support with real time force and film stress control

Polishing jig assembly for a new or refurbished electrostatic chuck

Substrate support assembly with deposited surface features

Method of polishing a new or a refurbished electrostatic chuck

Substrate chucking and dechucking methods

ESC substrate support with chucking force control

Method and apparatus for direct measurement of chucking force on an...

Substrate support with real time force and film stress control

Bond protection around porous plugs

Apparatus, systems, and methods for temperature control of substrat...

Substrate support assembly with deposited surface features

Polishing of electrostatic substrate support geometries

Substrate distance monitoring

Method of processing a substrate support assembly

Real time monitoring with closed loop chucking force control

Pixilated cooling, temperature controlled substrate support assembly

Method to remove residual charge on a electrostatic chuck during th...

Electrostatic chuck with external flow adjustments for improved tem...

Substrate support assembly with deposited surface features

Temperature control apparatus including groove-routed optical fiber...

Control systems employing deflection sensors to control clamping fo...

Pixelated capacitance controlled ESC

Substrate temperature control apparatus including optical fiber hea...

Electrostatic chuck with external flow adjustments for improved tem...

Method of processing a substrate support assembly

Patents Applicationslast 30 patents

FORMING MESAS ON AN ELECTROSTATIC CHUCK

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL

FORMING MESAS ON AN ELECTROSTATIC CHUCK

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL

METHODS FOR ELECTROSTATIC CHUCK CERAMIC SURFACING

METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING CHUCKING OPERATIONS...

FORMING MESAS ON AN ELECTROSTATIC CHUCK

CHAMBER COMPONENT WITH PROTECTIVE CERAMIC COATING CONTAINING YTTRIU...

Polishing jig assembley for a new or refurbished electrostatic chuck

ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...

METHOD AND APPARATUS FOR DIRECT MEASUREMENT OF CHUCKING FORCE ON AN...

BOND PROTECTION AROUND POROUS PLUGS

SUBSTRATE CHUCKING AND DECHUCKING METHODS

CMP SOFT POLISHING OF ELECTROSTATIC SUBSTRATE SUPPORT GEOMETRIES

SOFT CHUCKING AND DECHUCKING FOR ELECTROSTATIC CHUCKING SUBSTRATE S...

ESC SUBSTRATE SUPPORT WITH CHUCKING FORCE CONTROL

REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

NEW REPAIR METHOD FOR ELECTROSTATIC CHUCK

SUBSTRATE DISTANCE MONITORING

METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...

ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...

METHOD OF PROCESSING A SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

PIXELATED CAPACITANCE CONTROLLED ESC

CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL