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Wendy F. J. Gehoel-Van Ansem
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Eindhoven, NL
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last 30 patents
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Patent Grant
Method of monitoring a photolithographic process through utilizatio...
Patent number
5,866,283
Issue date
Feb 2, 1999
U.S. Philips Corporation
Peter Zandbergen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY