Wendy Yan

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Somers, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
In-situ plasma etch for TERA hard mask materials
- Patent number 6,903,023
- Issue date Jun 7, 2005
- International Business Machines Corporation
- Richard S. Wise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-based highly polymerizing plasma process for etching of or...
- Patent number 6,686,296
- Issue date Feb 3, 2004
- International Business Machines Corp.
- Gregory Costrini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-density plasma, organic anti-reflective coating etch system co...
- Patent number 6,228,279
- Issue date May 8, 2001
- International Business Machines Corporation
- Michael Armacost
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
In-situ plasma etch for TERA hard mask materials
- Publication number 20040053504
- Publication date Mar 18, 2004
- International Business Machines Corporation
- Richard S. Wise
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY