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Wenfei Gu
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Defect detection for multi-die masks
Patent number
11,727,556
Issue date
Aug 15, 2023
KLA Corp.
Wenfei Gu
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
DEFECT DETECTION FOR MULTI-DIE MASKS
Publication number
20230098730
Publication date
Mar 30, 2023
KLA Corporation
Wenfei Gu
G06 - COMPUTING CALCULATING COUNTING