Wenfei Gu

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Polygon-based geometry classification for semiconductor mask inspec...
- Patent number 10,140,698
- Issue date Nov 27, 2018
- KLA-Tencor Corporation
- Yin Xu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
POLYGON-BASED GEOMETRY CLASSIFICATION FOR SEMICONDUCTOR MASK INSPEC...
- Publication number 20170046471
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Yin Xu
- G06 - COMPUTING CALCULATING COUNTING