Wenfeng Sun

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Precise positioning system for dual stage switching exposure
- Patent number 8,027,028
- Issue date Sep 27, 2011
- Shanghai Micro Electronics Equipment Co., Ltd.
- Yingsheng Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PRECISE POSITIONING SYSTEM FOR DUAL STAGE SWITCHING EXPOSURE
- Publication number 20090219503
- Publication date Sep 3, 2009
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Yingsheng Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY