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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Coating compositions suitable for use with an overcoated photoresist
Patent number
9,726,977
Issue date
Aug 8, 2017
GLOBALFOUNDRIES Inc.
James F. Cameron
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wet developable bottom antireflective coating composition and metho...
Patent number
8,202,678
Issue date
Jun 19, 2012
International Business Machines Corporation
Kuang-Jung J. Chen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Fluorinated half ester of maleic anhydride polymers for dry 193 nm...
Patent number
7,754,820
Issue date
Jul 13, 2010
International Business Machines Corporation
Wu-Song S. Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Top coat material and use thereof in lithography processes
Patent number
7,700,262
Issue date
Apr 20, 2010
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Positive photoresist composition with a polymer including a fluoros...
Patent number
7,651,831
Issue date
Jan 26, 2010
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Positive photoresist composition with a polymer including a fluoros...
Patent number
7,638,264
Issue date
Dec 29, 2009
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Ultrathin polymeric photoacid generator layer and method of fabrica...
Patent number
7,638,266
Issue date
Dec 29, 2009
International Business Machines Corporation
Marie Angelopoulos
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Wet developable bottom antireflective coating composition and metho...
Patent number
7,563,563
Issue date
Jul 21, 2009
International Business Machines Corporation
Kuang-Jung J. Chen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Fluorinated half ester of maleic anhydride polymers for dry 193 nm...
Patent number
7,435,537
Issue date
Oct 14, 2008
International Business Machines Corporation
Wu-Song S. Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Top coat material and use thereof in lithography processes
Patent number
7,335,456
Issue date
Feb 26, 2008
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
High sensitivity resist compositions for electron-based lithography
Patent number
7,314,700
Issue date
Jan 1, 2008
International Business Machines Corporation
Wu-Song Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative photoresist composition including non-crosslinking chemistry
Patent number
7,235,342
Issue date
Jun 26, 2007
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluorinated photoresist materials with improved etch resistant prop...
Patent number
7,217,496
Issue date
May 15, 2007
International Business Machines Corporation
Mahmoud Khojasteh
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Negative photoresist and method of using thereof
Patent number
7,081,326
Issue date
Jul 25, 2006
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Positive photoresist composition with a polymer including a fluoros...
Patent number
7,063,931
Issue date
Jun 20, 2006
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Negative photoresist and method of using thereof
Patent number
7,011,923
Issue date
Mar 14, 2006
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Negative photoresist composition involving non-crosslinking chemistry
Patent number
6,991,890
Issue date
Jan 31, 2006
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Negative resist composition with fluorosulfonamide-containing polymer
Patent number
6,949,325
Issue date
Sep 27, 2005
International Business Machines Corporation
Wenjie Li
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist compositions with polymers having 2-cyano acrylic monomer
Patent number
6,902,874
Issue date
Jun 7, 2005
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist compositions containing non-polymeric silicon
Patent number
6,770,418
Issue date
Aug 3, 2004
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Cyclic olefin-based resist compositions having improved image stabi...
Patent number
6,756,180
Issue date
Jun 29, 2004
International Business Machines Corporation
Wenjie Li
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Thiophene-containing photo acid generators for photolithography
Patent number
6,696,216
Issue date
Feb 24, 2004
International Business Machines Corporation
Wenjie Li
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist compositions with polymers having 2-cyano acrylic monomer
Patent number
6,635,401
Issue date
Oct 21, 2003
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist compositions with polymers having pendant groups containing...
Patent number
6,534,239
Issue date
Mar 18, 2003
International Business Machines Corporation
Pushkara Rao Varanasi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Coating compositions suitable for use with an overcoated photoresist
Publication number
20100297557
Publication date
Nov 25, 2010
Rohm and Haas Electronic Materials L.L.C.
James F. Cameron
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHO...
Publication number
20090291392
Publication date
Nov 26, 2009
International Business Machines Corporation
Kuang-Jung J. Chen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
AROMATIC FLUORINE-FREE PHOTOACID GENERATORS AND PHOTORESIST COMPOSI...
Publication number
20090181319
Publication date
Jul 16, 2009
International Business Machines Corporation
Wenjie Li
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLUORINATED HALF ESTER OF MALEIC ANHYDRIDE POLYMERS FOR DRY 193 NM...
Publication number
20080286686
Publication date
Nov 20, 2008
International Business Machines Corporation
Wu-Song S. Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE PHOTORESIST COMPOSITION WITH A POLYMER INCLUDING A FLUOROS...
Publication number
20080233514
Publication date
Sep 25, 2008
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TOP COAT MATERIAL AND USE THEREOF IN LITHOGRAPHY PROCESSES
Publication number
20080166568
Publication date
Jul 10, 2008
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TOP COAT MATERIAL AND USE THEREOF IN LITHOGRAPHY PROCESSES
Publication number
20080038676
Publication date
Feb 14, 2008
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINATED HALF ESTER OF MALEIC ANHYDRIDE POLYMERS FOR DRY 193 NM...
Publication number
20080026315
Publication date
Jan 31, 2008
International Business Machines Corporation
Wu-Song S. Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wet developable bottom antireflective coating composition and metho...
Publication number
20070243484
Publication date
Oct 18, 2007
Kuang-Jung J. Chen
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Bottom antireflective coating composition and method for use thereof
Publication number
20070231736
Publication date
Oct 4, 2007
Kuang-Jung J. Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positive photoresist composition with a polymer including a fluoros...
Publication number
20060216643
Publication date
Sep 28, 2006
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High sensitivity resist compositions for electron-based lithography
Publication number
20060127800
Publication date
Jun 15, 2006
Wu-Song Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fluorinated photoresist materials with improved etch resistant prop...
Publication number
20060105269
Publication date
May 18, 2006
International Business Machines Corporation
Mahmoud Khojasteh
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Material and process for etched structure filling and planarizing
Publication number
20060089000
Publication date
Apr 27, 2006
International Business Machines Corporation
Ronald A. Della Guardia
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Ultrathin polymeric photoacid generator layer and method of fabrica...
Publication number
20060035167
Publication date
Feb 16, 2006
International Business Machines Corporation
Marie Angelopoulos
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Top coat material and use thereof in lithography processes
Publication number
20050266354
Publication date
Dec 1, 2005
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative photoresist and method of using thereof
Publication number
20050227167
Publication date
Oct 13, 2005
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative photoresist and method of using thereof
Publication number
20050202339
Publication date
Sep 15, 2005
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative photoresist composition involving non-crosslinking chemistry
Publication number
20050175928
Publication date
Aug 11, 2005
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative photoresist composition including non-crosslinking chemistry
Publication number
20050164507
Publication date
Jul 28, 2005
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positive photoresist composition with a polymer including a fluoros...
Publication number
20050153232
Publication date
Jul 14, 2005
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative resist composition with fluorosulfonamide-containing polymer
Publication number
20050058930
Publication date
Mar 17, 2005
Wenjie Li
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CYCLIC OLEFIN-BASED RESIST COMPOSITIONS HAVING IMPROVED IMAGE STABI...
Publication number
20040076903
Publication date
Apr 22, 2004
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist compositions with polymers having 2-cyano acrylic monomer
Publication number
20040072099
Publication date
Apr 15, 2004
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positive resist compositions containing non-polymeric silicon aditives
Publication number
20030124453
Publication date
Jul 3, 2003
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist compositions with polymers having 2-cyano acrylic monomer
Publication number
20030008502
Publication date
Jan 9, 2003
International Business Machines Corporation
Wenjie Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Thiophene-containing photo acid generators for photolithography
Publication number
20030008230
Publication date
Jan 9, 2003
International Business Machines Corporation
Wenjie Li
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Resist compositions with polymers having pendant groups containing...
Publication number
20020182534
Publication date
Dec 5, 2002
International Business Machines Corporation
Pushkara Rao Varanasi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC