Wenjin Shao

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for parameter-sensitive and orthogonal gauge de...
- Patent number 10,846,442
- Issue date Nov 24, 2020
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model-based scanner tuning systems and methods
- Patent number 10,569,469
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Model-based process simulation systems and methods
- Patent number 10,137,643
- Issue date Nov 27, 2018
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Smart selection and/or weighting of parameters for lithographic pro...
- Patent number 10,025,198
- Issue date Jul 17, 2018
- ASML Netherlands B.V.
- Yu Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for parameter-sensitive and orthogonal gauge de...
- Patent number 10,025,885
- Issue date Jul 17, 2018
- ASML Netherlands B.V.
- Jun Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern selection for lithographic model calibration
- Patent number 9,672,301
- Issue date Jun 6, 2017
- ASML Netherlands B.V.
- Yu Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information matrix creation and calibration test pattern selection...
- Patent number 9,588,439
- Issue date Mar 7, 2017
- ASML Netherlands B.V.
- Antoine Jean Bruguier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Harmonic resist model for use in a lithographic apparatus and a dev...
- Patent number 8,942,463
- Issue date Jan 27, 2015
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for parameter-sensitive and orthogonal gauge de...
- Patent number 8,930,172
- Issue date Jan 6, 2015
- ASML Netherlands B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Calibration pattern selection based on noise sensitivity
- Patent number 8,887,105
- Issue date Nov 11, 2014
- ASML Netherlands B.V.
- Antoine Jean Bruguier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model-based scanner tuning systems and methods
- Patent number 8,874,423
- Issue date Oct 28, 2014
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model-based process simulation systems and methods
- Patent number 8,806,387
- Issue date Aug 12, 2014
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern selection for lithographic model calibration
- Patent number 8,694,928
- Issue date Apr 8, 2014
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Harmonic resist model for use in a lithographic apparatus and a dev...
- Patent number 8,682,059
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model-based scanner tuning systems and methods
- Patent number 8,571,845
- Issue date Oct 29, 2013
- ASML Netherlands B.V.
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Harmonic resist model for use in a lithographic apparatus and a dev...
- Patent number 8,447,095
- Issue date May 21, 2013
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Delta TCC for fast sensitivity model computation
- Patent number 8,379,991
- Issue date Feb 19, 2013
- ASML Netherlands B.V.
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
- Publication number 20200189192
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DE...
- Publication number 20180322224
- Publication date Nov 8, 2018
- ASML NETHERLANDS B.V.
- Jun YE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DE...
- Publication number 20150186557
- Publication date Jul 2, 2015
- ASML NETHERLANDS B.V.
- Jun YE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
- Publication number 20150045935
- Publication date Feb 12, 2015
- ASML NETHERLANDS B.V.
- Yu CAO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS
- Publication number 20140351773
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Yu CAO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
- Publication number 20140208278
- Publication date Jul 24, 2014
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...
- Publication number 20140198972
- Publication date Jul 17, 2014
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
- Publication number 20140046646
- Publication date Feb 13, 2014
- ASML NETHERLANDS B.V.
- Yu CAO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...
- Publication number 20130251237
- Publication date Sep 26, 2013
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PRO...
- Publication number 20120005637
- Publication date Jan 5, 2012
- Yu CAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Systems for Parameter-Sensitive and Orthogonal Gauge De...
- Publication number 20110224956
- Publication date Sep 15, 2011
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PRO...
- Publication number 20110113390
- Publication date May 12, 2011
- Yu CAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DELTA TCC FOR FAST SENSITIVITY MODEL COMPUTATION
- Publication number 20100260427
- Publication date Oct 14, 2010
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...
- Publication number 20100128969
- Publication date May 27, 2010
- BRION TECHNOLOGIES INC.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
- Publication number 20100122225
- Publication date May 13, 2010
- Yu Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
- Publication number 20100010784
- Publication date Jan 14, 2010
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS
- Publication number 20090300573
- Publication date Dec 3, 2009
- Yu Cao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Wenjin Shao

Person

Patents Grantslast 30 patents

Methods and systems for parameter-sensitive and orthogonal gauge de...

Model-based scanner tuning systems and methods

Model-based process simulation systems and methods

Smart selection and/or weighting of parameters for lithographic pro...

Methods and systems for parameter-sensitive and orthogonal gauge de...

Pattern selection for lithographic model calibration

Information matrix creation and calibration test pattern selection...

Harmonic resist model for use in a lithographic apparatus and a dev...

Methods and systems for parameter-sensitive and orthogonal gauge de...

Calibration pattern selection based on noise sensitivity

Model-based scanner tuning systems and methods

Model-based process simulation systems and methods

Pattern selection for lithographic model calibration

Harmonic resist model for use in a lithographic apparatus and a dev...

Model-based scanner tuning systems and methods

Harmonic resist model for use in a lithographic apparatus and a dev...

Delta TCC for fast sensitivity model computation

Patents Applicationslast 30 patents

MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS

METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DE...

METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DE...

MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS

MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS

PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION

HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...

MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS

HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...

SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PRO...

Methods and Systems for Parameter-Sensitive and Orthogonal Gauge De...

SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PRO...

DELTA TCC FOR FAST SENSITIVITY MODEL COMPUTATION

HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEV...

PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION

MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS

MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS