Wenliang LI

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting the flatness of wafer and the method thereof
- Patent number 9,134,122
- Issue date Sep 15, 2015
- Shanghai Huali Microelectronics Corporation
- WenLiang Li
- B24 - GRINDING POLISHING
Information Patent Grant
Phase shift focus monitor reticle, manufacturing method thereof and...
- Patent number 8,722,287
- Issue date May 13, 2014
- Shanghai Huali Microelectronics Corporation
- Wenliang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR DETECTING THE FLATNESS OF WAFER AND THE METHOD THEREOF
- Publication number 20140153000
- Publication date Jun 5, 2014
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- WenLiang Li
- G01 - MEASURING TESTING
Information Patent Application
PHASE SHIFT FOCUS MONITOR RETICLE, MANUFACTURING METHOD THEREOF AND...
- Publication number 20130137016
- Publication date May 30, 2013
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Wenliang LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY