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Patents Grants
last 30 patents
Information
Patent Grant
Heat treatment apparatus and method of controlling the same
Patent number
9,909,809
Issue date
Mar 6, 2018
Tokyo Electron Limited
Goro Takahashi
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Thermal processing apparatus and method of controlling the same
Patent number
9,748,122
Issue date
Aug 29, 2017
Tokyo Electron Limited
Koji Yoshii
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
9,324,591
Issue date
Apr 26, 2016
Tokyo Electron Limited
Koji Yoshii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment system, heat treatment method, and non-transitory co...
Patent number
9,259,761
Issue date
Feb 16, 2016
Tokyo Electron Limited
Yuichi Takenaga
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Vertical-type heat treatment apparatus
Patent number
9,255,736
Issue date
Feb 9, 2016
Tokyo Electron Limited
Koji Yoshii
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Temperature control method, storage medium storing a program theref...
Patent number
9,209,057
Issue date
Dec 8, 2015
Tokyo Electron Limited
Koji Yoshii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus and method of controlling the same
Patent number
9,207,665
Issue date
Dec 8, 2015
Tokyo Electron Limited
Goro Takahashi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Thermal processing apparatus and method of controlling the same
Patent number
8,835,811
Issue date
Sep 16, 2014
Tokyo Electron Limited
Koji Yoshii
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Thermal processing apparatus, method for regulating temperature of...
Patent number
8,354,135
Issue date
Jan 15, 2013
Tokyo Electron Limited
Yuichi Takenaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal processing apparatus and thermal processing method for obje...
Patent number
8,080,767
Issue date
Dec 20, 2011
Tokyo Electron Limited
Kenichi Yamaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system, processing method, and computer program
Patent number
8,055,372
Issue date
Nov 8, 2011
Tokyo Electron Limited
Yuki Kataoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, control method for substrate processin...
Patent number
7,953,512
Issue date
May 31, 2011
Tokyo Electron Limitetd
Yuichi Takenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat system, heat method, and program
Patent number
7,896,649
Issue date
Mar 1, 2011
Tokyo Electron Limited
Noriaki Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Information processing apparatus, semiconductor manufacturing syste...
Patent number
7,869,888
Issue date
Jan 11, 2011
Tokyo Electron Limited
Noriaki Koyama
G05 - CONTROLLING REGULATING
Information
Patent Grant
Heat processing apparatus, method of automatically tuning control c...
Patent number
7,860,585
Issue date
Dec 28, 2010
Tokyo Electron Limited
Goro Takahashi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Heat treatment method and heat treatment apparatus
Patent number
7,625,604
Issue date
Dec 1, 2009
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Determining method of thermal processing condition
Patent number
7,138,607
Issue date
Nov 21, 2006
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,922,522
Issue date
Jul 26, 2005
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Grant
Heat treatment apparatus and controller for heat treatment apparatu...
Patent number
6,847,015
Issue date
Jan 25, 2005
Tokyo Electron Limited
Wenling Wang
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Batch-type heat treatment apparatus and control method for the batc...
Patent number
6,803,548
Issue date
Oct 12, 2004
Tokyo Electron Limited
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Determining method of thermal processing condition
Patent number
6,787,377
Issue date
Sep 7, 2004
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Batch type heat treatment system, method for controlling same, and...
Patent number
6,730,885
Issue date
May 4, 2004
Tokyo Electron Limited
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,622,104
Issue date
Sep 16, 2003
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Grant
Method of determining set temperature trajectory for heat treatment...
Patent number
6,495,805
Issue date
Dec 17, 2002
Tokyo Electron Limited
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of temperature-calibrating heat treating apparatus
Patent number
6,329,643
Issue date
Dec 11, 2001
Tokyo Electron Limited
Fujio Suzuki
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
THERMAL PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20140238972
Publication date
Aug 28, 2014
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...
Publication number
20130256293
Publication date
Oct 3, 2013
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...
Publication number
20130260039
Publication date
Oct 3, 2013
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20130204416
Publication date
Aug 8, 2013
TOKYO ELECTRON LIMITED
Goro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20130186878
Publication date
Jul 25, 2013
TOKYO ELECTRON LIMITED
Goro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL TREATMENT APPARATUS, TEMPERATURE CONTROL SYSTEM, THERMAL TR...
Publication number
20130065189
Publication date
Mar 14, 2013
TOKYO ELECTRON LIMITED
Koji Yoshii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL METHOD, STORAGE MEDIUM STORING A PROGRAM THEREF...
Publication number
20130037534
Publication date
Feb 14, 2013
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Publication number
20120258415
Publication date
Oct 11, 2012
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT CONTROL SYSTEM AND HEAT TREATMENT CONTROL METHOD
Publication number
20120251966
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Koji YOSHII
G05 - CONTROLLING REGULATING
Information
Patent Application
THERMAL PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME
Publication number
20120223066
Publication date
Sep 6, 2012
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL-TYPE HEAT TREATMENT APPARATUS, AND CONTROL METHOD FOR SAME
Publication number
20120064469
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL-TYPE HEAT TREATMENT APPARATUS
Publication number
20120064472
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Koji YOSHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
Publication number
20110035165
Publication date
Feb 10, 2011
TOKYO ELECTRON LIMITED
Noriaki KOYAMA
G05 - CONTROLLING REGULATING
Information
Patent Application
THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD FOR OBJE...
Publication number
20090311807
Publication date
Dec 17, 2009
TOKYO ELECTRON LIMITED
Kenichi Yamaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, METHOD FOR REGULATING TEMPERATURE OF...
Publication number
20090232967
Publication date
Sep 17, 2009
TOKYO ELECTRON LIMITED
Yuichi TAKENAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing system, processing method, and computer program
Publication number
20090117259
Publication date
May 7, 2009
Yuki Kataoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing system, control method for substrate processin...
Publication number
20090078197
Publication date
Mar 26, 2009
TOKYO ELECTRON LIMITED
Yuichi Takenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat processing apparatus, method of automatically tuning control c...
Publication number
20080255683
Publication date
Oct 16, 2008
TOKYO ELECTRON LIMITED
Goro Takahashi
G05 - CONTROLLING REGULATING
Information
Patent Application
Heat system, heat method, and program
Publication number
20080213716
Publication date
Sep 4, 2008
Noriaki Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
Publication number
20070282554
Publication date
Dec 6, 2007
TOKYO ELECTRON LIMITED
Noriaki KOYAMA
G05 - CONTROLLING REGULATING
Information
Patent Application
Thermal processing appratus and thermal processing method
Publication number
20070074660
Publication date
Apr 5, 2007
Youngchul Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment method and heat treament apparatus
Publication number
20050201894
Publication date
Sep 15, 2005
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Determining method of thermal processing condition
Publication number
20040226933
Publication date
Nov 18, 2004
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20040005147
Publication date
Jan 8, 2004
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Application
Method of determining heat treatment conditions
Publication number
20030109071
Publication date
Jun 12, 2003
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of processing wafer
Publication number
20020127828
Publication date
Sep 12, 2002
Fujio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat treatment apparatus and controller for heat treatment apparatu...
Publication number
20020074324
Publication date
Jun 20, 2002
Wenling Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20020069025
Publication date
Jun 6, 2002
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Application
Batch-type heat treatment apparatus and control method for the batc...
Publication number
20020045146
Publication date
Apr 18, 2002
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Batch type heat treatment system, method for controlling same, and...
Publication number
20020014483
Publication date
Feb 7, 2002
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS