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Singapore, SG
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last 30 patents
Information
Patent Grant
Liquid immersion scanning exposure system using an immersion liquid...
Patent number
8,896,810
Issue date
Nov 25, 2014
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wenzhan Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determination of lithography tool process condition
Patent number
8,741,511
Issue date
Jun 3, 2014
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wenzhan Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Statistical optical proximity correction
Patent number
8,572,524
Issue date
Oct 29, 2013
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wenzhan Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DETERMINATION OF LITHOGRAPHY TOOL PROCESS CONDITION
Publication number
20140170539
Publication date
Jun 19, 2014
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Wenzhan ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MA...
Publication number
20130325395
Publication date
Dec 5, 2013
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Wenzhan Zhou
G01 - MEASURING TESTING
Information
Patent Application
LIQUID IMMERSION SCANNING EXPOSURE SYSTEM USING AN IMMERSION LIQUID...
Publication number
20110157567
Publication date
Jun 30, 2011
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Wenzhan Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING FEED-FORWARD CONTROL
Publication number
20090179307
Publication date
Jul 16, 2009
Chartered Semiconductor Manufacturing LTD.
Wenzhan Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STATISTICAL OPTICAL PROXIMITY CORRECTION
Publication number
20090132992
Publication date
May 21, 2009
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Wenzhan ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY