Weoi San Lok

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Method for reducing argon diffusion from high density plasma films
- Patent number 7,297,640
- Issue date Nov 20, 2007
- Chartered Semiconductor Manufacturing Ltd.
- Jun Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for reducing argon diffusion from high density plasma films
- Publication number 20060154491
- Publication date Jul 13, 2006
- Chartered Semiconductor Manufacturing Ltd.
- Jun Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...