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Weonmook LEE
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Suwon-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma chemical reactor
Patent number
8,815,047
Issue date
Aug 26, 2014
DMS Co., Ltd.
Hwankook Chae
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Side gas injector for plasma reaction chamber
Patent number
8,652,296
Issue date
Feb 18, 2014
DMS Co., Ltd.
Minshik Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor and etching method using the same
Patent number
8,323,522
Issue date
Dec 4, 2012
DMS Co., Ltd.
Hyeokjin Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor
Patent number
8,158,068
Issue date
Apr 17, 2012
DMS Co., Ltd.
Kunjoo Park
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
GAS INJECTION SYSTEM FOR ETCHING PROFILE CONTROL
Publication number
20110203735
Publication date
Aug 25, 2011
Seongsul SEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR AND ETCHING METHOD USING THE SAME
Publication number
20110155694
Publication date
Jun 30, 2011
Hyeokjin JANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRI...
Publication number
20110154843
Publication date
Jun 30, 2011
Sungyong KO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIDE GAS INJECTOR FOR PLASMA REACTION CHAMBER
Publication number
20110079356
Publication date
Apr 7, 2011
Minshik Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLOR SYSTEM FOR ETCHING GAS
Publication number
20110049111
Publication date
Mar 3, 2011
Sungyong KO
G05 - CONTROLLING REGULATING
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA REACTOR
Publication number
20100110605
Publication date
May 6, 2010
Weonmook LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR
Publication number
20090280040
Publication date
Nov 12, 2009
Kunjoo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHEMICAL REACTOR
Publication number
20090129997
Publication date
May 21, 2009
Hwankook CHAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...