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Werner Baer
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Beverly, MA, US
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Patent Grant
Ion source for use in an ion implanter
Patent number
7,105,840
Issue date
Sep 12, 2006
Axcelis Technologies, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ION SOURCE FOR USE IN AN ION IMPLANTER
Publication number
20060169921
Publication date
Aug 3, 2006
Axcelis Technologies, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS