Werner Blersch

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Bussmannshausen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for thermally treating objects
- Patent number 6,775,471
- Issue date Aug 10, 2004
- Mattson Thermal Products GmbH
- Werner Blersch
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device and method for thermally treating substrates
- Patent number 6,614,005
- Issue date Sep 2, 2003
- Steag RTP Systems GmbH
- Heinrich Walk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for the thermal treatment of substrates
- Patent number 6,316,747
- Issue date Nov 13, 2001
- Steag RTP Systems GmbH
- Werner Blersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid thermal processing (RTP) system with rotating substrate
- Patent number 5,965,047
- Issue date Oct 12, 1999
- Steag AST
- Werner Blersch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and device for thermally treating objects
- Publication number 20030166317
- Publication date Sep 4, 2003
- Werner Blersch
- G05 - CONTROLLING REGULATING