Werner Lang

Follow

Person

Geislingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Objective, particularly a projection objective for use in semicondu...
- Patent number 7,123,427
- Issue date Oct 17, 2006
- Carl Zeiss SMT AG
- Alexander Kohl
- G02 - OPTICS
Information Patent Grant
Mounting apparatus for an optical element
- Patent number 6,816,325
- Issue date Nov 9, 2004
- Carl Zeiss SMT AG
- Jochen Becker
- G02 - OPTICS
Information Patent Grant
Mounting apparatus for an optical element
- Patent number 6,580,570
- Issue date Jun 17, 2003
- Carl-Zeiss-Stiftung
- Jochen Becker
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Optical measuring system, and a projection objective
- Publication number 20080100930
- Publication date May 1, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Optical measuring system, and a projection objective
- Publication number 20040257675
- Publication date Dec 23, 2004
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Objective, particularly a projection objective for use in semicondu...
- Publication number 20040201909
- Publication date Oct 14, 2004
- Alexander Kohl
- G02 - OPTICS
Information Patent Application
Mounting apparatus for an optical element
- Publication number 20020085292
- Publication date Jul 4, 2002
- Jochen Becker
- G02 - OPTICS