Werner Tabarelli

Person

Vaduz, LI

People

Patents Grantslast 30 patents

Information Patent Grant
Interferometer gas flow system
- Patent number 5,146,284
- Issue date Sep 8, 1992
- Tabarelli; Werner
- Werner Tabarelli
- G01 - MEASURING TESTING
Information Patent Grant
Device for the projection copying of masks onto a workpiece
- Patent number 4,621,922
- Issue date Nov 11, 1986
- Perkin-Elmer Censor Anstalt
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the projection copying of masks
- Patent number 4,619,524
- Issue date Oct 28, 1986
- Perkin-Elmer Censor Anstalt
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for projection copying of masks onto a workpiece
- Patent number 4,592,648
- Issue date Jun 3, 1986
- Perkin-Elmer Censor Anstalt
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for projecting a pattern on a semiconductor substrate
- Patent number 4,592,650
- Issue date Jun 3, 1986
- Perkin-Elmer Censor Anstalt
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for the photolithographic manufacture of integrated circu...
- Patent number 4,509,852
- Issue date Apr 9, 1985
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithographic method for the manufacture of integrated circuits
- Patent number 4,346,164
- Issue date Aug 24, 1982
- Werner Tabarelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Werner Tabarelli

Person

Patents Grantslast 30 patents

Interferometer gas flow system

Device for the projection copying of masks onto a workpiece

Device for the projection copying of masks

Device for projection copying of masks onto a workpiece

Apparatus for projecting a pattern on a semiconductor substrate

Apparatus for the photolithographic manufacture of integrated circu...

Photolithographic method for the manufacture of integrated circuits