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Werner Zapka
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Gaertringen-Rohrau, DE
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last 30 patents
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Patent Grant
Process for making masks with structures in the submicron range
Patent number
5,055,383
Issue date
Oct 8, 1991
International Business Machines Corporation
Otto Koblinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Removal of particles from solid-state surfaces by laser bombardment
Patent number
4,980,536
Issue date
Dec 25, 1990
International Business Machines Corporation
Karl Asch
B08 - CLEANING
Information
Patent Grant
Mask for ion, electron or X-ray lithography and method of making it
Patent number
4,855,197
Issue date
Aug 8, 1989
International Business Machines Corporation
Werner Zapka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for testing magnetic head/disk interfaces
Patent number
4,724,392
Issue date
Feb 9, 1988
International Business Machines Corporation
Upali Bandara
G11 - INFORMATION STORAGE
Information
Patent Grant
Error-corrected corpuscular beam lithography
Patent number
4,578,587
Issue date
Mar 25, 1986
International Business Machines Corporation
Uwe Behringer
B82 - NANO-TECHNOLOGY