Weston L. Sousa

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Defect detection for multi-die masks
- Patent number 11,727,556
- Issue date Aug 15, 2023
- KLA Corp.
- Wenfei Gu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Integrated multi-tool reticle inspection
- Patent number 11,557,031
- Issue date Jan 17, 2023
- KLA Corporation
- Weston Sousa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dispositioning defects detected on extreme ultraviolet photomasks
- Patent number 10,866,197
- Issue date Dec 15, 2020
- KLA Corp.
- Vikram Tolani
- G01 - MEASURING TESTING
Information Patent Grant
Inspection of photomasks by comparing two photomasks
- Patent number 10,451,563
- Issue date Oct 22, 2019
- KLA-Tencor Corporation
- Weston L. Sousa
- G01 - MEASURING TESTING
Information Patent Grant
Critical dimension uniformity monitoring for extreme ultra-violet r...
- Patent number 10,288,415
- Issue date May 14, 2019
- KLA-Tencor Corporation
- Rui-fang Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension uniformity monitoring for extreme ultraviolet re...
- Patent number 9,863,761
- Issue date Jan 9, 2018
- KLA-Tencor Corporation
- Rui-fang Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated multi-pass inspection
- Patent number 9,778,207
- Issue date Oct 3, 2017
- KLA-Tencor Corp.
- Weston L. Sousa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Auto-focus system and methods for die-to-die inspection
- Patent number 9,110,039
- Issue date Aug 18, 2015
- KLA-Tencor Corporation
- Michael J. Wright
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of a substrate inspection tool
- Patent number 7,599,051
- Issue date Oct 6, 2009
- KLA-Tencor Technologies Corporation
- Steven M. Labovitz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT DETECTION FOR MULTI-DIE MASKS
- Publication number 20230098730
- Publication date Mar 30, 2023
- KLA Corporation
- Wenfei Gu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTEGRATED MULTI-TOOL RETICLE INSPECTION
- Publication number 20210158500
- Publication date May 27, 2021
- KLA Corporation
- Weston Sousa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS
- Publication number 20200096862
- Publication date Mar 26, 2020
- KLA Corporation
- Vikram Tolani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS
- Publication number 20180238816
- Publication date Aug 23, 2018
- KLA-Tencor Corporation
- Weston L. Sousa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRA-VIOLET R...
- Publication number 20180080759
- Publication date Mar 22, 2018
- KLA-Tencor Corporation
- Rui-fang Shi
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED MULTI-PASS INSPECTION
- Publication number 20170256043
- Publication date Sep 7, 2017
- KLA-Tencor Corporation
- Weston L. Sousa
- G01 - MEASURING TESTING
Information Patent Application
Integrated Multi-Pass Inspection
- Publication number 20160093040
- Publication date Mar 31, 2016
- KLA-Tencor Corporation
- Weston L. Sousa
- G01 - MEASURING TESTING
Information Patent Application
CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRAVIOLET RE...
- Publication number 20150144798
- Publication date May 28, 2015
- KLA-Tencor Corporation
- Rui-fang Shi
- G01 - MEASURING TESTING
Information Patent Application
AUTO-FOCUS SYSTEM AND METHODS FOR DIE-TO-DIE INSPECTION
- Publication number 20150029499
- Publication date Jan 29, 2015
- KLA-Tencor Corporation
- Michael J. Wright
- G01 - MEASURING TESTING

Weston L. Sousa

Person

Patents Grantslast 30 patents

Defect detection for multi-die masks

Integrated multi-tool reticle inspection

Dispositioning defects detected on extreme ultraviolet photomasks

Inspection of photomasks by comparing two photomasks

Critical dimension uniformity monitoring for extreme ultra-violet r...

Critical dimension uniformity monitoring for extreme ultraviolet re...

Integrated multi-pass inspection

Auto-focus system and methods for die-to-die inspection

Calibration of a substrate inspection tool

Patents Applicationslast 30 patents

DEFECT DETECTION FOR MULTI-DIE MASKS

INTEGRATED MULTI-TOOL RETICLE INSPECTION

DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS

INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS

CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRA-VIOLET R...

INTEGRATED MULTI-PASS INSPECTION

Integrated Multi-Pass Inspection

CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRAVIOLET RE...

AUTO-FOCUS SYSTEM AND METHODS FOR DIE-TO-DIE INSPECTION