Wie-Liang Tsai

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Exhaust adaptor and method for chamber de-gassing
- Patent number 6,920,891
- Issue date Jul 26, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mu-Tsang Lin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Exhaust adaptor and method for chamber de-gassing
- Publication number 20040065366
- Publication date Apr 8, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Mu-Tsang Lin
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Ventilation system and method of using
- Publication number 20040002299
- Publication date Jan 1, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Mu-Tsang Lin
- H01 - BASIC ELECTRIC ELEMENTS