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Wieland Stockl
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Jena, DE
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last 30 patents
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Patent Grant
Electrostatic chuck with anti-reflective coating, measuring method...
Patent number
8,081,317
Issue date
Dec 20, 2011
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Gerhard Kalkowski
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE MADE OF AN ALUMINUM-SILICON ALLOY OR CRYSTALLINE SILICON,...
Publication number
20130057952
Publication date
Mar 7, 2013
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Stefan Risse
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ELECTROSTATICE CHUCK WITH ANTI-REFLECTIVE COATING, MEASURING METHOD...
Publication number
20100046005
Publication date
Feb 25, 2010
Fraunhofer-Gesellschaft zur Förderung der angewand ten Forschung e.V.
Gerhard Kalkowski
G01 - MEASURING TESTING
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Patent Application
Electrostatic Chuck With Anti-Reflective Coating, Measuring Method...
Publication number
20090279101
Publication date
Nov 12, 2009
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Gerhard Kalkowski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Rear Surface Mirror
Publication number
20080096010
Publication date
Apr 24, 2008
Michael Scheler
G02 - OPTICS