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Wilbur Jordan Reichmann II
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San Pablo, CA, US
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last 30 patents
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Patent Grant
Electrostatic clamp, lithographic apparatus and method of manufactu...
Patent number
9,348,236
Issue date
May 24, 2016
ASML Holding N.V.
Peter Richard Helmus
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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last 30 patents
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Patent Application
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...
Publication number
20130308116
Publication date
Nov 21, 2013
ASML Holding N.V.
Peter Richard Helmus
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER