Membership
Tour
Register
Log in
Wilfred Pau
Follow
Person
Santa Clara, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method for etching having a controlled distribution of process results
Patent number
7,648,914
Issue date
Jan 19, 2010
Applied Materials, Inc.
Thomas J. Kropewnicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of detecting an endpoint during etching of a material within...
Patent number
6,635,573
Issue date
Oct 21, 2003
Applied Materials, Inc.
Wilfred Pau
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR ETCHING WITH HARDMASK
Publication number
20070161255
Publication date
Jul 12, 2007
Wilfred Pau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching having a controlled distribution of process results
Publication number
20070042603
Publication date
Feb 22, 2007
Thomas J. Kropewnicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of detecting an endpoint during etching of a material within...
Publication number
20030082919
Publication date
May 1, 2003
APPLIED MATERIALS, INC.
Wilfred Pau
H01 - BASIC ELECTRIC ELEMENTS