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Wilfried Goeres
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Huckelhoven, DE
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last 30 patents
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Patent Grant
CVD system having particle separator
Patent number
9,970,106
Issue date
May 15, 2018
Aixtron SE
Wilfried Goeres
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
CVD SYSTEM HAVING PARTICLE SEPARATOR
Publication number
20150322566
Publication date
Nov 12, 2015
AIXTRON SE
Wilfried Goeres
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...