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Wilfried Lerch
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Blaustein, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer boat and treatment apparatus for wafers
Patent number
10,867,825
Issue date
Dec 15, 2020
Michael Klick
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate holder and a device and a method for treating substrates
Patent number
9,711,388
Issue date
Jul 18, 2017
Centrotherm Photovoltaics AG
Johann Georg Reichart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device for determining the temperature of a substrate
Patent number
9,612,158
Issue date
Apr 4, 2017
Centrotherm Thermal Solutions GmbH & Co. KG
Denise Reichel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a layer on a substrate at low temperatures
Patent number
9,252,011
Issue date
Feb 2, 2016
Centrotherm Photovoltaics AG
Juergen Niess
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device and method for producing dielectric layers in microwave plasma
Patent number
8,716,153
Issue date
May 6, 2014
HQ-Dielectrics GmbH
Wilfried Lerch
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
Patent number
8,236,706
Issue date
Aug 7, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
Patent number
7,977,258
Issue date
Jul 12, 2011
Mattson Technology, Inc.
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for thermal treatment of substrates
Patent number
6,953,338
Issue date
Oct 11, 2005
Steag RTP Systems GmbH
Uwe Kreiser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for the removing of adsorbed molecules from a chamber
Patent number
6,830,631
Issue date
Dec 14, 2004
Steag RTP Systems GmbH
Zsolt Nenyei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Adjusting of defect profiles in crystal or crystalline-like structures
Patent number
6,809,011
Issue date
Oct 26, 2004
Mattson Thermal Products GmbH
Wilfried Lerch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for calibrating measurements of temperatures inde...
Patent number
6,561,694
Issue date
May 13, 2003
Steag RTP Systems GmbH
Wilfried Lerch
G01 - MEASURING TESTING
Information
Patent Grant
Method for rapid thermal processing (RTP) of silicon substrates
Patent number
6,100,149
Issue date
Aug 8, 2000
Steag-RTP Systems
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of oxidation of semiconductor wafers in a rapid thermal proc...
Patent number
5,935,650
Issue date
Aug 10, 1999
Wilfried Lerch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for determining emissivity of semiconductor ma...
Patent number
5,727,017
Issue date
Mar 10, 1998
AST Electronik, GmbH
Michael Maurer
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND DEVICE FOR THE THERMAL TREATMENT OF SUBSTRATES AND HOLDI...
Publication number
20180366352
Publication date
Dec 20, 2018
CENTROTHERM INTERNATIONAL AG
Steffem Müller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA-TREATMENT DEVICE FOR WAFERS
Publication number
20180076070
Publication date
Mar 15, 2018
Michael Klick
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER BOAT AND TREATMENT APPARATUS FOR WAFERS
Publication number
20180076071
Publication date
Mar 15, 2018
Michael Klick
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS
Publication number
20180066354
Publication date
Mar 8, 2018
Michael Klick
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR DETECTING A PLASMA IGNITION
Publication number
20160217982
Publication date
Jul 28, 2016
Centrotherm Photovoltaics AG
Wilhelm Kegel
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE HOLDER AND A DEVICE AND A METHOD FOR TREATING SUBSTRATES
Publication number
20150294893
Publication date
Oct 15, 2015
CENTROTHERM THERMAL SOLUTIONS GMBH & CO. KG
Johann Georg Reichart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
Publication number
20150087085
Publication date
Mar 26, 2015
CENTROTHERM THERMAL SOLUTIONS GMBH & CO. KG
Hartmut Rick
G01 - MEASURING TESTING
Information
Patent Application
DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
Publication number
20140248720
Publication date
Sep 4, 2014
CENTROTHERM THERMAL SOLUTIONS GMBH & CO. KG
Denise Reichel
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR FORMING A LAYER ON A SUBSTRATE AT LOW TEMPERATURES
Publication number
20140179117
Publication date
Jun 26, 2014
CENTROTHERM THERMAL SOLUTIONS GMBH & CO. KG
Jurgen Niess
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20120298039
Publication date
Nov 29, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR PRODUCING DIELECTRIC LAYERS IN MICROWAVE PLASMA
Publication number
20110217849
Publication date
Sep 8, 2011
Wilfried Lerch
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20100151694
Publication date
Jun 17, 2010
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for thermally processing a plurality of wafer-sha...
Publication number
20080248657
Publication date
Oct 9, 2008
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device for thermal treatment of substrates
Publication number
20040029065
Publication date
Feb 12, 2004
Uwe Kreiser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for the removing of adsorbed molecules from a chamber
Publication number
20030155000
Publication date
Aug 21, 2003
Zsolt Nenyei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Adjusting defect profiles in crystal or crystalline-like structures
Publication number
20030134492
Publication date
Jul 17, 2003
Wilfried Lerch
C30 - CRYSTAL GROWTH