Wilheim Ulrich

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Imaging optical system and projection exposure system including the...
- Patent number 9,285,515
- Issue date Mar 15, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM AND METHOD FOR MANUFACTU...
- Publication number 20140327898
- Publication date Nov 6, 2014
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM INCLUDING THE...
- Publication number 20140132941
- Publication date May 15, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
Catadioptric multi-mirror systems for projection lithography
- Publication number 20060109559
- Publication date May 25, 2006
- CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Russell Hudyma
- G02 - OPTICS
Information Patent Application
Objective with fluoride crystal lenses
- Publication number 20040190151
- Publication date Sep 30, 2004
- Daniel Krahmer
- G02 - OPTICS