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Wilhelm Egle
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical component having an improved transient thermal behavior and...
Patent number
7,965,456
Issue date
Jun 21, 2011
Carl Zeiss SMT GmbH
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Optical component having an improved transient thermal behavior and...
Patent number
7,483,223
Issue date
Jan 27, 2009
Carl Zeiss SMT AG
Wilhelm Egle
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Collector configured of mirror shells
Patent number
7,460,212
Issue date
Dec 2, 2008
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Focusing-device for the radiation from a light source
Patent number
7,410,265
Issue date
Aug 12, 2008
Carl Zeiss SMT AG
Martin Antoni
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Collector with fastening devices for fastening mirror shells
Patent number
7,321,126
Issue date
Jan 22, 2008
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Collector having unused region for illumination systems using a wav...
Patent number
7,244,954
Issue date
Jul 17, 2007
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Collector with fastening devices for fastening mirror shells
Patent number
7,091,505
Issue date
Aug 15, 2006
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Collector having unused region for illumination systems using a wav...
Patent number
7,015,489
Issue date
Mar 21, 2006
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Illumination system that suppresses debris from a light source
Patent number
6,927,403
Issue date
Aug 9, 2005
Carl Zeiss SMT AG
Wolfgang Singer
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...
Publication number
20110211180
Publication date
Sep 1, 2011
Carl Zeiss SMT GMBH
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Application
Optical Component Having an Improved Transient Thermal Behavior and...
Publication number
20090021950
Publication date
Jan 22, 2009
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Application
High-Precision Optical Surface Prepared by Sagging from a Masterpiece
Publication number
20080099935
Publication date
May 1, 2008
Wilhelm Egle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Collector with fastening devices for fastening mirror shells
Publication number
20080042079
Publication date
Feb 21, 2008
Carl Zeiss SMT
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Collector configured of mirror shells
Publication number
20080013680
Publication date
Jan 17, 2008
Carl Zeiss SMT AG
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Collector with fastening devices for fastening mirror shells
Publication number
20060291062
Publication date
Dec 28, 2006
Carl Zeiss SMT AG
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Collector having unused region for illumination systems using a wav...
Publication number
20060097202
Publication date
May 11, 2006
Carl Zeiss SMT AG
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Optical component having an improved transient thermal behavior and...
Publication number
20060093253
Publication date
May 4, 2006
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Application
Collector with fastening devices for fastening mirror shells
Publication number
20040227103
Publication date
Nov 18, 2004
Carl Zeiss SMT AG
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Collector having unused region for illumination systems using a wav...
Publication number
20040065817
Publication date
Apr 8, 2004
Carl Zeiss SMT AG
Wolfgang Singer
G02 - OPTICS
Information
Patent Application
Illumination system that suppresses debris from a ligh source
Publication number
20030095623
Publication date
May 22, 2003
Wolfgang Singer
B82 - NANO-TECHNOLOGY