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Wilhelm Maurer
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chromeless phase mask layout generation
Patent number
7,172,838
Issue date
Feb 6, 2007
Wilhelm Maurer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and methods for generating an inspection reference pattern
Patent number
6,691,052
Issue date
Feb 10, 2004
KLA-Tencor Corporation
Wilhelm Maurer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Chromeless phase mask layout generation
Publication number
20040063000
Publication date
Apr 1, 2004
Mentor Graphics Corporation
Wilhelm Maurer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPC method for generating corrected patterns for a phase-shifting m...
Publication number
20020071997
Publication date
Jun 13, 2002
Infineon Techonologies AG
Marco Ahrens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY