Wilhelm P. Platow

Person

Newburyport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Extended lifetime dual indirectly-heated cathode ion source
- Patent number 11,798,775
- Issue date Oct 24, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with multiple bias electrodes
- Patent number 11,545,330
- Issue date Jan 3, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepped indirectly heated cathode with improved shielding
- Patent number 11,244,800
- Issue date Feb 8, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tetrode extraction apparatus for ion source
- Patent number 10,573,485
- Issue date Feb 25, 2020
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving the performance and extending the lifetime...
- Patent number 9,530,615
- Issue date Dec 27, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- B08 - CLEANING
Information Patent Grant
Method for ion implantation
- Patent number 9,431,247
- Issue date Aug 30, 2016
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Medium current ribbon beam for ion implantation
- Patent number 9,269,528
- Issue date Feb 23, 2016
- ADAVANCED ION BEAM TECHNOLOGY, INC.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 9,142,379
- Issue date Sep 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal RF antenna with dielectric insulation
- Patent number 8,912,976
- Issue date Dec 16, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 8,809,800
- Issue date Aug 19, 2014
- Varian Semicoductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving extracted ion beam quality using high-tran...
- Patent number 8,466,431
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional gas injection for an ion source cathode assembly
- Patent number 8,263,944
- Issue date Sep 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling beam current uniformity in an...
- Patent number 8,003,956
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source cleaning end point detection
- Patent number 8,003,959
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source cleaning method and apparatus
- Patent number 7,888,662
- Issue date Feb 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing a multimode ion source
- Patent number 7,812,321
- Issue date Oct 12, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Peter Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling beam current uniformity in an...
- Patent number 7,767,986
- Issue date Aug 3, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Dorai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for optical ion beam metrology
- Patent number 7,723,697
- Issue date May 25, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the production of purified liquids and vapors
- Patent number 7,413,596
- Issue date Aug 19, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Determining ion beam parallelism using refraction method
- Patent number 7,397,049
- Issue date Jul 8, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Raymond Callahan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY
- Publication number 20230139138
- Publication date May 4, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE
- Publication number 20230100805
- Publication date Mar 30, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM
- Publication number 20210398772
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
- Publication number 20210398765
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES FOR MOISTURE-BASED CALIBRATION
- Publication number 20180172635
- Publication date Jun 21, 2018
- Rapiscan Systems, Inc.
- Hanh T. Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR GAS PRE-SEPARATION FOR DETECTION OF SUBSTANCES
- Publication number 20170274316
- Publication date Sep 28, 2017
- Morpho Detection, LLC
- Hanh T. Lai
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ION IMPLANTATION
- Publication number 20160133469
- Publication date May 12, 2016
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Zhimin WAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEDIUM CURRENT RIBBON BEAM FOR ION IMPLANTATION
- Publication number 20150102233
- Publication date Apr 16, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Robert KAIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source and a method for in-situ cleaning thereof
- Publication number 20140319369
- Publication date Oct 30, 2014
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Internal RF Antenna With Dielectric Insulation
- Publication number 20140070697
- Publication date Mar 13, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Techniques For Improving The Performance And Extending The Lifetime...
- Publication number 20140041684
- Publication date Feb 13, 2014
- Peter F. Kurunczi
- B08 - CLEANING
Information Patent Application
TECHNIQUES FOR GENERATING UNIFORM ION BEAM
- Publication number 20110143527
- Publication date Jun 16, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. PLATOW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source Cleaning End Point Detection
- Publication number 20100327159
- Publication date Dec 30, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...
- Publication number 20100200768
- Publication date Aug 12, 2010
- Varian Semiconductor Equipment Associates, Inc.
- JAMES BUFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY
- Publication number 20100155619
- Publication date Jun 24, 2010
- Varian Semiconductor Equipment Associates Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...
- Publication number 20100084582
- Publication date Apr 8, 2010
- Varian Semiconductor Equipment Associates, Inc.
- D. Jeffrey LISCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...
- Publication number 20090314962
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh DORAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE CLEANING METHOD AND APPARATUS
- Publication number 20090314951
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE
- Publication number 20090309041
- Publication date Dec 17, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Peter Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR OPTICAL ION BEAM METROLOGY
- Publication number 20090078883
- Publication date Mar 26, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determining ion beam parallelism using refraction method
- Publication number 20070221871
- Publication date Sep 27, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Raymond Callahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the production of purified liquids and vapors
- Publication number 20070056316
- Publication date Mar 15, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Wilhelm P. Platow
- H01 - BASIC ELECTRIC ELEMENTS

Wilhelm P. Platow

Person

Patents Grantslast 30 patents

Extended lifetime dual indirectly-heated cathode ion source

Ion source with multiple bias electrodes

Stepped indirectly heated cathode with improved shielding

Tetrode extraction apparatus for ion source

Techniques for improving the performance and extending the lifetime...

Method for ion implantation

Medium current ribbon beam for ion implantation

Ion source and a method for in-situ cleaning thereof

Internal RF antenna with dielectric insulation

Ion source and a method for in-situ cleaning thereof

Techniques for improving extracted ion beam quality using high-tran...

Directional gas injection for an ion source cathode assembly

Method and apparatus for controlling beam current uniformity in an...

Ion source cleaning end point detection

Ion source cleaning method and apparatus

Techniques for providing a multimode ion source

Method and apparatus for controlling beam current uniformity in an...

Techniques for optical ion beam metrology

Method and apparatus for the production of purified liquids and vapors

Determining ion beam parallelism using refraction method

Patents Applicationslast 30 patents

CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY

EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM

STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING

METHODS AND DEVICES FOR MOISTURE-BASED CALIBRATION

SYSTEMS AND METHODS FOR GAS PRE-SEPARATION FOR DETECTION OF SUBSTANCES

METHOD FOR ION IMPLANTATION

MEDIUM CURRENT RIBBON BEAM FOR ION IMPLANTATION

Ion source and a method for in-situ cleaning thereof

Internal RF Antenna With Dielectric Insulation

Techniques For Improving The Performance And Extending The Lifetime...

TECHNIQUES FOR GENERATING UNIFORM ION BEAM

Ion Source Cleaning End Point Detection

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...

DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY

METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...

METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...

ION SOURCE CLEANING METHOD AND APPARATUS

TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE

TECHNIQUES FOR OPTICAL ION BEAM METROLOGY

Determining ion beam parallelism using refraction method

Method and apparatus for the production of purified liquids and vapors