Wilhelm Ulrich

Person

Aalen-Dewangen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Imaging optical system and projection exposure installation for mic...
- Patent number 10,481,500
- Issue date Nov 19, 2019
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for imaging sample
- Patent number 10,073,256
- Issue date Sep 11, 2018
- Carl Zeiss Microscopy GmbH
- Wolfgang Singer
- G02 - OPTICS
Information Patent Grant
Lithography projection objective, and a method for correcting image...
- Patent number 9,964,859
- Issue date May 8, 2018
- Carl Zeiss SMT GmbH
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective with parallel, offset optical axes
- Patent number 9,772,478
- Issue date Sep 26, 2017
- Carl Zeiss SMT GmbH
- David Shafer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective with intermediate images
- Patent number 9,726,979
- Issue date Aug 8, 2017
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithography projection optical system, tool and method of prod...
- Patent number 9,482,961
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 9,465,300
- Issue date Oct 11, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Lithography projection objective, and a method for correcting image...
- Patent number 9,316,922
- Issue date Apr 19, 2016
- Carl Zeiss SMT GmbH
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 9,304,407
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical system and illumination optical system
- Patent number 9,182,578
- Issue date Nov 10, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Projection exposure system and projection exposure method
- Patent number 9,146,475
- Issue date Sep 29, 2015
- Carl Zeiss SMT GmbH
- Paul Gräupner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective with intermediate images
- Patent number 9,134,618
- Issue date Sep 15, 2015
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Grant
Imaging optics and projection exposure installation for microlithog...
- Patent number 9,057,964
- Issue date Jun 16, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective with intermediate images
- Patent number 9,019,596
- Issue date Apr 28, 2015
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Grant
Microlithography projection optical system, tool and method of prod...
- Patent number 8,970,819
- Issue date Mar 3, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective with intermediate images
- Patent number 8,913,316
- Issue date Dec 16, 2014
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Grant
Immersion catadioptric projection objective having two intermediate...
- Patent number 8,908,269
- Issue date Dec 9, 2014
- Carl Zeiss SMT GmbH
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Lithography projection objective, and a method for correcting image...
- Patent number 8,879,159
- Issue date Nov 4, 2014
- Carl Zeiss SMT GmbH
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithgraphic exposure apparatus
- Patent number 8,873,151
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Alexander Sohmer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective including an aspherized plate
- Patent number 8,804,234
- Issue date Aug 12, 2014
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,730,572
- Issue date May 20, 2014
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Method for correcting a lithography projection objective, and such...
- Patent number 8,659,744
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Wilhelm Ulrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 8,632,195
- Issue date Jan 21, 2014
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical system and projection exposure system including the...
- Patent number 8,605,255
- Issue date Dec 10, 2013
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Optical system for microlithography
- Patent number 8,456,616
- Issue date Jun 4, 2013
- Carl Zeiss SMT GmbH
- Daniel Kraehmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric projection objective
- Patent number 8,416,490
- Issue date Apr 9, 2013
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective with mirror group
- Patent number 8,363,315
- Issue date Jan 29, 2013
- Carl Zeiss SMT GmbH
- Alexander Epple
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,355,201
- Issue date Jan 15, 2013
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
High transmission, high aperture catadioptric projection objective...
- Patent number 8,345,222
- Issue date Jan 1, 2013
- Carl Zeiss SMT GmbH
- Daniel Kraehmer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,339,701
- Issue date Dec 25, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...
- Publication number 20190072861
- Publication date Mar 7, 2019
- Carl Zeiss SMT GMBH
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20180031815
- Publication date Feb 1, 2018
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
Catadioptric Projection Objective With Intermediate Images
- Publication number 20170363963
- Publication date Dec 21, 2017
- Carl Zeiss SMT GMBH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
DISPLAY DEVICE WHICH CAN BE PLACED ON THE HEAD OF A USER
- Publication number 20170343819
- Publication date Nov 30, 2017
- Carl-Zeiss AG
- Scott LERNER
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...
- Publication number 20160370709
- Publication date Dec 22, 2016
- Carl Zeiss SMT GMBH
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20160274343
- Publication date Sep 22, 2016
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
DEVICE FOR IMAGING SAMPLE
- Publication number 20160131884
- Publication date May 12, 2016
- CARL ZEISS MICROSCOPY GMBH
- Wolfgang SINGER
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20160131980
- Publication date May 12, 2016
- Carl Zeiss SMT GMBH
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20150226948
- Publication date Aug 13, 2015
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
Catadioptric Projection Objective With Intermediate Images
- Publication number 20150205084
- Publication date Jul 23, 2015
- Carl Zeiss SMT GMBH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20150055214
- Publication date Feb 26, 2015
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM, TOOL AND METHOD OF PROD...
- Publication number 20150049319
- Publication date Feb 19, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...
- Publication number 20140376086
- Publication date Dec 25, 2014
- David Shafer
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...
- Publication number 20140327891
- Publication date Nov 6, 2014
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Catadioptric Projection Objective With Intermediate Images
- Publication number 20140118713
- Publication date May 1, 2014
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
Catadioptric Projection Objective With Intermediate Images
- Publication number 20140111786
- Publication date Apr 24, 2014
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20140111787
- Publication date Apr 24, 2014
- David R. Shafer
- G02 - OPTICS
Information Patent Application
Catadioptric Projection Objective With Intermediate Images
- Publication number 20140078483
- Publication date Mar 20, 2014
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
Projection Exposure System and Projection Exposure Method
- Publication number 20130182234
- Publication date Jul 18, 2013
- Carl Zeiss SMT GMBH
- Paul Graupner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH MIRROR GROUP
- Publication number 20130120728
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Alexander Epple
- G02 - OPTICS
Information Patent Application
CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
- Publication number 20130063710
- Publication date Mar 14, 2013
- CARL ZEISS SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120274918
- Publication date Nov 1, 2012
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120274919
- Publication date Nov 1, 2012
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120250147
- Publication date Oct 4, 2012
- David Shafer
- G02 - OPTICS
Information Patent Application
CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
- Publication number 20120188525
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
METHOD FOR CORRECTING A LITHOGRAPHY PROJECTION OBJECTIVE, AND SUCH...
- Publication number 20120188636
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Wilhelm Ulrich
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH INTERMEDIATE IMAGES
- Publication number 20120162625
- Publication date Jun 28, 2012
- Carl Zeiss SMT GMBH
- Aurelian DODOC
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM AND ILLUMINATION OPTICAL SYSTEM
- Publication number 20120147347
- Publication date Jun 14, 2012
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICS AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOG...
- Publication number 20120069315
- Publication date Mar 22, 2012
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MIC...
- Publication number 20120069312
- Publication date Mar 22, 2012
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS

Wilhelm Ulrich

Person

Patents Grantslast 30 patents

Imaging optical system and projection exposure installation for mic...

Device for imaging sample

Lithography projection objective, and a method for correcting image...

Catadioptric projection objective with parallel, offset optical axes

Catadioptric projection objective with intermediate images

Microlithography projection optical system, tool and method of prod...

Catoptric objectives and systems using catoptric objectives

Lithography projection objective, and a method for correcting image...

Catoptric objectives and systems using catoptric objectives

Imaging optical system and illumination optical system

Projection exposure system and projection exposure method

Catadioptric projection objective with intermediate images

Imaging optics and projection exposure installation for microlithog...

Catadioptric projection objective with intermediate images

Microlithography projection optical system, tool and method of prod...

Catadioptric projection objective with intermediate images

Immersion catadioptric projection objective having two intermediate...

Lithography projection objective, and a method for correcting image...

Illumination system for a microlithgraphic exposure apparatus

Catadioptric projection objective including an aspherized plate

Catadioptric projection objective

Method for correcting a lithography projection objective, and such...

Catoptric objectives and systems using catoptric objectives

Imaging optical system and projection exposure system including the...

Optical system for microlithography

Catadioptric projection objective

Catadioptric projection objective with mirror group

Catadioptric projection objective

High transmission, high aperture catadioptric projection objective...

Catadioptric projection objective

Patents Applicationslast 30 patents

LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

Catadioptric Projection Objective With Intermediate Images

DISPLAY DEVICE WHICH CAN BE PLACED ON THE HEAD OF A USER

LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...

CATADIOPTRIC PROJECTION OBJECTIVE

DEVICE FOR IMAGING SAMPLE

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

Catadioptric Projection Objective With Intermediate Images

CATADIOPTRIC PROJECTION OBJECTIVE

MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM, TOOL AND METHOD OF PROD...

CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...

LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...

Catadioptric Projection Objective With Intermediate Images

Catadioptric Projection Objective With Intermediate Images

CATADIOPTRIC PROJECTION OBJECTIVE

Catadioptric Projection Objective With Intermediate Images

Projection Exposure System and Projection Exposure Method

CATADIOPTRIC PROJECTION OBJECTIVE WITH MIRROR GROUP

CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES

METHOD FOR CORRECTING A LITHOGRAPHY PROJECTION OBJECTIVE, AND SUCH...

CATADIOPTRIC PROJECTION OBJECTIVE WITH INTERMEDIATE IMAGES

IMAGING OPTICAL SYSTEM AND ILLUMINATION OPTICAL SYSTEM

IMAGING OPTICS AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOG...

IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MIC...