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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,130,019
Issue date
Oct 31, 2006
ASML Netherlands B.V.
Petrus Rutgerus Bartray
G02 - OPTICS
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,061,579
Issue date
Jun 13, 2006
ASML Netherlands B.V.
Pertrus Rutgerus Bartray
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Radiation system and lithographic apparatus
Publication number
20070115443
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and method of...
Publication number
20030123037
Publication date
Jul 3, 2003
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY