Wilhelmus Maria Corbeij

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate measurement method and apparatus
- Patent number 8,497,976
- Issue date Jul 30, 2013
- ASML Netherlands B.V.
- Wilhelmus Maria Corbeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,482,718
- Issue date Jul 9, 2013
- ASML Netherlands B.V.
- Wilhelmus Maria Corbeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Characterization of transmission losses in an optical system
- Patent number 7,791,724
- Issue date Sep 7, 2010
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic system, sensor, and method of measuring properties of...
- Patent number 7,480,050
- Issue date Jan 20, 2009
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Metrology apparatus, lithographic apparatus, process apparatus metr...
- Patent number 7,403,293
- Issue date Jul 22, 2008
- ASML Netherlands
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus
- Patent number 6,348,303
- Issue date Feb 19, 2002
- ASM Lithography B.V.
- Sijbe A. H. Van Der Lei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110043780
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Wilhelmus Maria Corbeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE MEASUREMENT METHOD AND APPARATUS
- Publication number 20100091258
- Publication date Apr 15, 2010
- ASML NETHERLANDS B.V.
- Wilhelmus Maria Corbeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of characterising the transmission losses of an optical system
- Publication number 20070296960
- Publication date Dec 27, 2007
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic system, sensor, and method of measuring properties of...
- Publication number 20070182964
- Publication date Aug 9, 2007
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Metrology apparatus, lithographic apparatus, process apparatus metr...
- Publication number 20070013921
- Publication date Jan 18, 2007
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology apparatus, lithographic apparatus, process apparatus, met...
- Publication number 20070002336
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Wilhelmus Maria Corbeij

Person

Patents Grantslast 30 patents

Substrate measurement method and apparatus

Lithographic apparatus and device manufacturing method

Characterization of transmission losses in an optical system

Lithographic system, sensor, and method of measuring properties of...

Metrology apparatus, lithographic apparatus, process apparatus metr...

Lithographic projection apparatus

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE MEASUREMENT METHOD AND APPARATUS

Method of characterising the transmission losses of an optical system

Lithographic system, sensor, and method of measuring properties of...

Metrology apparatus, lithographic apparatus, process apparatus metr...

Metrology apparatus, lithographic apparatus, process apparatus, met...