Willem Arie Van Helden

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Bergschenhoek, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for thermally conditioning an optical element
- Patent number 9,176,398
- Issue date Nov 3, 2015
- ASML Netherlands B.V.
- Roger Wilhelmus Antonius Henricus Schmitz
- G02 - OPTICS