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Delft, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Aberration correction in charged particle system
Patent number
11,348,756
Issue date
May 31, 2022
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
10,586,625
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
High voltage shielding and cooling in a charged particle beam gener...
Patent number
10,037,864
Issue date
Jul 31, 2018
Mapper Lithography IP B.V.
Alexander Hendrik Vincent Van Veen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi-electrode electron optics
Patent number
9,905,322
Issue date
Feb 27, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Charged particle lithography system and beam generator
Patent number
9,653,261
Issue date
May 16, 2017
Mapper Lithography IP B.V.
Alexander Hendrik Vincent Van Veen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi-electrode stack arrangement
Patent number
9,355,751
Issue date
May 31, 2016
Mapper Lithography IP B.V.
Willem Henk Urbanus
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-electrode cooling arrangement
Patent number
9,165,693
Issue date
Oct 20, 2015
Mapper Lithography IP B.V.
Willem Henk Urbanus
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Charged particle lithography system with intermediate chamber
Patent number
8,916,837
Issue date
Dec 23, 2014
Mapper Lithography IP B.V.
Laura Dinu-Gürtler
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle lithography system with intermediate chamber
Patent number
8,586,949
Issue date
Nov 19, 2013
Mapper Lithography IP B.V.
Laura Dinu-Gürtler
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHA...
Publication number
20240312756
Publication date
Sep 19, 2024
ASML NETHERLANDS B.V.
Jasper Hendrik GRASMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
Publication number
20220285124
Publication date
Sep 8, 2022
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20210383941
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20200194141
Publication date
Jun 18, 2020
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
Publication number
20180277334
Publication date
Sep 27, 2018
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent VAN VEEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High voltage shielding and cooling in a charged particle beam gener...
Publication number
20170250053
Publication date
Aug 31, 2017
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20170221674
Publication date
Aug 3, 2017
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MULTI-ELECTRODE ELECTRON OPTICS
Publication number
20150136995
Publication date
May 21, 2015
MAPPER LITHOGRAPHY IP BV
Marco Jan-Jaco WIELAND
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MULTI-ELECTRODE STACK ARRANGEMENT
Publication number
20150137010
Publication date
May 21, 2015
MAPPER LITHOGRAPHY IP BV
Willem Henk URBANUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRODE COOLING ARRANGEMENT
Publication number
20150137009
Publication date
May 21, 2015
MAPPER LITHOGRAPHY IP BV
Willem Henk URBANUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle lithography system and beam generator
Publication number
20150124229
Publication date
May 7, 2015
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20140061497
Publication date
Mar 6, 2014
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20120293780
Publication date
Nov 22, 2012
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY