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Willem Herman Gertruda Anna KOENEN
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Roermond, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic projection apparatus and method for controlling a supp...
Patent number
8,174,671
Issue date
May 8, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration methods, lithographic apparatus and patterning device f...
Patent number
7,889,314
Issue date
Feb 15, 2011
ASML Netherlands B.V.
Willem Herman Gertruda Anna Koenen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a lithographic processing machine, control syst...
Patent number
7,756,597
Issue date
Jul 13, 2010
ASML Netherlands B.V.
Norbertus Josephus Martinus Van Den Nieuwelaar
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,557,903
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for determining Z position errors...
Patent number
7,333,174
Issue date
Feb 19, 2008
ASML Netherlands, B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, system, method, computer program, and appar...
Patent number
7,012,672
Issue date
Mar 14, 2006
ASML Netherlands B.V.
Tasja Van Rhee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT SYSTEM, METHOD AND LITOGRAPHIC APPARATUS
Publication number
20110317142
Publication date
Dec 29, 2011
ASML NETHERLANDS B.V.
Henrikus Herman Marie Cox
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CORRECTING A POSITION OF A ST...
Publication number
20110208459
Publication date
Aug 25, 2011
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage system, lithographic apparatus including such stage system, a...
Publication number
20090128791
Publication date
May 21, 2009
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Projection Apparatus and Method for Controlling a Supp...
Publication number
20080319569
Publication date
Dec 25, 2008
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of operating a lithographic processing machine, control syst...
Publication number
20050102723
Publication date
May 12, 2005
ASML NETHERLANDS B.V.
Norbertus Josephus Martinus Van Den Nieuwelaar
G05 - CONTROLLING REGULATING