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Willem Herman Gertruda Anna Koenen
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Roermond, NL
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last 30 patents
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Patent Application
Calibration methods, lithographic apparatus and patterning device f...
Publication number
20070222965
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070132980
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for determining Z position errors...
Publication number
20060170892
Publication date
Aug 3, 2006
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and method for determining Z position errors...
Publication number
20060139595
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus, system, method, computer program, and appar...
Publication number
20040239905
Publication date
Dec 2, 2004
ASML NETHERLANDS B.V.
Tasja Van Rhee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY