Willem Herman Gertruda Anna Koenen

Person

Roermond, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of controlling a position of a first object relative to a se...
- Patent number 11,774,865
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Thijs Adriaan Cornelis Van Keulen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position measurement system, grating for a position measurement sys...
- Patent number 9,651,877
- Issue date May 16, 2017
- ASML Netherlands B.V.
- Willem Herman Gertruda Anna Koenen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and displacemen...
- Patent number 9,575,416
- Issue date Feb 21, 2017
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate positioning system, lithographic apparatus and device man...
- Patent number 9,470,988
- Issue date Oct 18, 2016
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement system, lithographic apparatus and device manu...
- Patent number 8,922,756
- Issue date Dec 30, 2014
- ASML Netherlands B.V.
- Willem Herman Gertruda Anna Koenen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for correcting a position of a st...
- Patent number 8,781,775
- Issue date Jul 15, 2014
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement system, method and lithographic apparatus
- Patent number 8,681,316
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Henrikus Herman Marie Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system, lithographic apparatus including such stage system, a...
- Patent number 8,451,454
- Issue date May 28, 2013
- ASML Netherlands B.V.
- Willem Herman Gertruda Anna Koenen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CONTROLLING A POSITION OF A FIRST OBJECT RELATIVE TO A SE...
- Publication number 20220299889
- Publication date Sep 22, 2022
- ASML NETHERLANDS B.V.
- Thijs Adriaan Cornelis VAN KEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT SYSTEM, GRATING FOR A POSITION MEASUREMENT SYS...
- Publication number 20150316856
- Publication date Nov 5, 2015
- ASML NETHERLANDS B.V.
- Willem Herman Gertruda Anna KOENEN
- G02 - OPTICS
Information Patent Application
SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...
- Publication number 20150277242
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DISPLACEMEN...
- Publication number 20150212428
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANU...
- Publication number 20130050670
- Publication date Feb 28, 2013
- ASML NETHERLANDS B.V.
- Willem Herman Gertruda Anna Koenen
- H01 - BASIC ELECTRIC ELEMENTS

Willem Herman Gertruda Anna Koenen

Person

Patents Grantslast 30 patents

Method of controlling a position of a first object relative to a se...

Position measurement system, grating for a position measurement sys...

Lithographic apparatus, device manufacturing method and displacemen...

Substrate positioning system, lithographic apparatus and device man...

Position measurement system, lithographic apparatus and device manu...

Lithographic apparatus and method for correcting a position of a st...

Measurement system, method and lithographic apparatus

Stage system, lithographic apparatus including such stage system, a...

Patents Applicationslast 30 patents

METHOD OF CONTROLLING A POSITION OF A FIRST OBJECT RELATIVE TO A SE...

POSITION MEASUREMENT SYSTEM, GRATING FOR A POSITION MEASUREMENT SYS...

SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DISPLACEMEN...

POSITION MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANU...