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Willem Seine Christian ROELOFS
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Deurne, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,782,349
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of obtaining measurements, apparatus for performing a proces...
Patent number
11,774,862
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Hakki Ergün Cekli
G01 - MEASURING TESTING
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,592,753
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,327,407
Issue date
May 10, 2022
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of obtaining measurements, apparatus for performing a proces...
Patent number
11,175,591
Issue date
Nov 16, 2021
ASML Netherlands B.V.
Hakki Ergün Cekli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focus and overlay improvement by modifying a patterning device
Patent number
11,126,093
Issue date
Sep 21, 2021
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
11,029,610
Issue date
Jun 8, 2021
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,962,887
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process
Patent number
10,877,381
Issue date
Dec 29, 2020
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,527,958
Issue date
Jan 7, 2020
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20230168591
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20220229373
Publication date
Jul 21, 2022
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...
Publication number
20220035259
Publication date
Feb 3, 2022
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20210080836
Publication date
Mar 18, 2021
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FOCUS AND OVERLAY IMPROVEMENT BY MODIFYING A PATTERNING DEVICE
Publication number
20200310242
Publication date
Oct 1, 2020
ASML NETHERLANDS B.V.
Richard Johannes Franciscus VAN HAREN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20200272061
Publication date
Aug 27, 2020
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20200081356
Publication date
Mar 12, 2020
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
Publication number
20200019067
Publication date
Jan 16, 2020
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING PELLICLE COMPENSATION CORRECTIONS FOR A LITHO...
Publication number
20190294059
Publication date
Sep 26, 2019
ASML NETHERLANDS B.V.
Leon Paul VAN DIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...
Publication number
20190137892
Publication date
May 9, 2019
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20190094721
Publication date
Mar 28, 2019
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY