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Willem Van Schaik
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's-Hertogenbosch, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,508,487
Issue date
Mar 24, 2009
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
7,115,886
Issue date
Oct 3, 2006
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,924,492
Issue date
Aug 2, 2005
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
6,828,569
Issue date
Dec 7, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for flushing at least one internal space of an objective
Patent number
6,825,914
Issue date
Nov 30, 2004
Carl Zeiss SMT AG
Joachim Schroeder
G02 - OPTICS
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,724,460
Issue date
Apr 20, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,538,716
Issue date
Mar 25, 2003
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20050112508
Publication date
May 26, 2005
ASML NETHERLANDS B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20030096193
Publication date
May 22, 2003
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20030095240
Publication date
May 22, 2003
ASM LITHOGRAPHY B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020134947
Publication date
Sep 26, 2002
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020018189
Publication date
Feb 14, 2002
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY