Willi Heintel

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Mirror arrangement for microlithographic projection exposure appara...
- Patent number 10,663,873
- Issue date May 26, 2020
- Carl Zeiss SMT GmbH
- Willi Heintel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical component
- Patent number 10,133,183
- Issue date Nov 20, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G02 - OPTICS
Information Patent Grant
Optical element
- Patent number 9,658,542
- Issue date May 23, 2017
- Carl Zeiss SMT GmbH
- Willi Heintel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element unit and method of supporting an optical element
- Patent number 9,134,501
- Issue date Sep 15, 2015
- Carl Zeiss SMT GmbH
- Dirk Schaffer
- G02 - OPTICS
Information Patent Grant
Optical module with minimized overrun of the optical element
- Patent number 8,441,747
- Issue date May 14, 2013
- Carl Zeiss SMT GmbH
- Willi Heintel
- G02 - OPTICS
Information Patent Grant
Connecting arrangement for an optical device
- Patent number 8,305,701
- Issue date Nov 6, 2012
- Carl Zeiss SMT GmbH
- Heiko Methe
- G02 - OPTICS
Information Patent Grant
Optical element module
- Patent number 7,859,641
- Issue date Dec 28, 2010
- Carl Zeiss SMT AG
- Thomas Bischoff
- G02 - OPTICS
Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Optical subassembly and projection objective in semiconductor litho...
- Patent number 7,448,763
- Issue date Nov 11, 2008
- Carl Zeiss SMT AG
- Andreas Frommeyer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MIRROR ARRANGEMENT FOR MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARA...
- Publication number 20170108788
- Publication date Apr 20, 2017
- Carl Zeiss SMT GMBH
- Willi Heintel
- G02 - OPTICS
Information Patent Application
OPTICAL COMPONENT
- Publication number 20160370707
- Publication date Dec 22, 2016
- Carl Zeiss SMT GMBH
- Michael Patra
- G02 - OPTICS
Information Patent Application
Optical Element Unit And Method Of Supporting An Optical Element
- Publication number 20160109679
- Publication date Apr 21, 2016
- Carl Zeiss SMT GMBH
- Dirk Schaffer
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT
- Publication number 20150103326
- Publication date Apr 16, 2015
- Carl Zeiss SMT GMBH
- Willi Heintel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT MODULE
- Publication number 20110063590
- Publication date Mar 17, 2011
- Carl Zeiss SMT AG
- Thomas Bischoff
- G02 - OPTICS
Information Patent Application
CONNECTING ARRANGEMENT FOR AN OPTICAL DEVICE
- Publication number 20100065252
- Publication date Mar 18, 2010
- Carl Zeiss SMT AG
- Heiko Methe
- G02 - OPTICS
Information Patent Application
Optical element unit and method of supporting an optical element
- Publication number 20090147229
- Publication date Jun 11, 2009
- Carl Zeiss SMT AG
- Dirk Schaffer
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT MODULE
- Publication number 20080239270
- Publication date Oct 2, 2008
- Carl Zeiss SMT AG
- Thomas Bischoff
- G02 - OPTICS
Information Patent Application
Optical module with minimized overrun of the optical element
- Publication number 20080204689
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Willi Heintel
- G02 - OPTICS
Information Patent Application
Optical subassembly and projection objective in semiconductor litho...
- Publication number 20070014037
- Publication date Jan 18, 2007
- Andreas Frommeyer
- G02 - OPTICS
Information Patent Application
Reflecting optical element with eccentric optical passageway
- Publication number 20060262704
- Publication date Nov 23, 2006
- Carl Zeiss SMT AG
- Hans-Jurgen Scherle
- G02 - OPTICS

Willi Heintel

Person

Patents Grantslast 30 patents

Mirror arrangement for microlithographic projection exposure appara...

Optical component

Optical element

Optical element unit and method of supporting an optical element

Optical module with minimized overrun of the optical element

Connecting arrangement for an optical device

Optical element module

Reflecting optical element with eccentric optical passageway

Optical subassembly and projection objective in semiconductor litho...

Patents Applicationslast 30 patents

MIRROR ARRANGEMENT FOR MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARA...

OPTICAL COMPONENT

Optical Element Unit And Method Of Supporting An Optical Element

OPTICAL ELEMENT

OPTICAL ELEMENT MODULE

CONNECTING ARRANGEMENT FOR AN OPTICAL DEVICE

Optical element unit and method of supporting an optical element

OPTICAL ELEMENT MODULE

Optical module with minimized overrun of the optical element

Optical subassembly and projection objective in semiconductor litho...

Reflecting optical element with eccentric optical passageway