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William A. Eckes
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Castro Valley, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-axis interferometer system using independent, single axis int...
Patent number
7,518,732
Issue date
Apr 14, 2009
William A. Eckes
G01 - MEASURING TESTING
Information
Patent Grant
Substrate support assembly with thermal isolating plate
Patent number
7,470,919
Issue date
Dec 30, 2008
Applied Materials, Inc.
Yacov Elgar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cooling module for charged particle beam column elements
Patent number
7,345,287
Issue date
Mar 18, 2008
Applied Materials, Inc.
Thomas Jasinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-axis interferometer system using independent, single axis int...
Patent number
7,336,369
Issue date
Feb 26, 2008
Applied Materials, Inc.
William A. Eckes
G01 - MEASURING TESTING
Information
Patent Grant
Laser reflector alignment
Patent number
6,219,146
Issue date
Apr 17, 2001
Etec Systems, Inc.
Robert Innes
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MULTI-AXIS INTERFEROMETER SYSTEM USING INDEPENDENT, SINGLE AXIS INT...
Publication number
20080043246
Publication date
Feb 21, 2008
WILLIAM A. ECKES
G01 - MEASURING TESTING
Information
Patent Application
TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZI...
Publication number
20070206456
Publication date
Sep 6, 2007
Jeffrey S. Sullivan
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH THERMAL ISOLATING PLATE
Publication number
20070157886
Publication date
Jul 12, 2007
APPLIED MATERIALS, INC.
Yacov Elgar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cooling module for charged particle beam column elements
Publication number
20070085019
Publication date
Apr 19, 2007
Thomas Jasinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal conditioning plate with gas gap leak
Publication number
20070077354
Publication date
Apr 5, 2007
APPLIED MATERIALS, INC.
Paul A. O'Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-axis interferometer system using independent, single axis int...
Publication number
20070076216
Publication date
Apr 5, 2007
APPLIED MATERIALS, INC.
William A. Eckes
G01 - MEASURING TESTING