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William A. Webster
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Tewksbury, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of producing a MEMS device
Patent number
8,343,369
Issue date
Jan 1, 2013
Analog Devices, Inc.
Manolo G. Mena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS capping method and apparatus
Patent number
6,893,574
Issue date
May 17, 2005
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method of Producing a MEMS Device
Publication number
20110266639
Publication date
Nov 3, 2011
Analog Devices, Inc.
Manolo G. Mena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of producing a MEMS device
Publication number
20080225505
Publication date
Sep 18, 2008
Analog Devices, Inc.
John R. Martin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of producing a MEMS device
Publication number
20060027522
Publication date
Feb 9, 2006
John R. Martin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS capping method and apparatus
Publication number
20030075794
Publication date
Apr 24, 2003
Lawrence E. Felton
B81 - MICRO-STRUCTURAL TECHNOLOGY