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William Bintz
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Londonderry, NH, US
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for metal contamination control in an ion impl...
Patent number
11,923,169
Issue date
Mar 5, 2024
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Angular scanning using angular energy filter
Patent number
9,455,116
Issue date
Sep 27, 2016
Axcells Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, system, and apparatus for improving doping uniformity in hi...
Patent number
7,462,844
Issue date
Dec 9, 2008
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION
Publication number
20230038565
Publication date
Feb 9, 2023
Axcelis Technologies, Inc.
Causon Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...
Publication number
20210249222
Publication date
Aug 12, 2021
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Angular Scanning Using Angular Energy Filter
Publication number
20150318142
Publication date
Nov 5, 2015
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method, system, and apparatus for improving doping uniformity in hi...
Publication number
20070085037
Publication date
Apr 19, 2007
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS