William Brown Farnham

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Hockessin, DE

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Patents Applicationslast 30 patents

Information Patent Application
Photoresists, fluoropolymers and processes for 157 nm microlithography
- Publication number 20050239984
- Publication date Oct 27, 2005
- Andrew E. Feiring
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...