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William Clark
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Hampstead, NH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Pulsed mass flow delivery system and method
Patent number
7,829,353
Issue date
Nov 9, 2010
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated pressure and flow ratio control system
Patent number
7,706,925
Issue date
Apr 27, 2010
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Pulsed mass flow delivery system and method
Patent number
7,628,860
Issue date
Dec 8, 2009
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed mass flow delivery system and method
Patent number
7,628,861
Issue date
Dec 8, 2009
MKS Instruments, Inc.
William R. Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed mass flow delivery system and method
Patent number
7,615,120
Issue date
Nov 10, 2009
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for pressure fluctuation insensitive mass flow...
Patent number
6,932,098
Issue date
Aug 23, 2005
MKS Instruments, Inc.
Ali Shajii
G01 - MEASURING TESTING
Information
Patent Grant
System and method for dividing flow
Patent number
6,418,954
Issue date
Jul 16, 2002
MKS Instruments, Inc.
Matthew Thomas Taylor
G05 - CONTROLLING REGULATING
Information
Patent Grant
Linearized controlled valves
Patent number
4,327,894
Issue date
May 4, 1982
MKS Instruments, Inc.
James H. Ewing
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
Integrated pressure and flow ratio control system
Publication number
20080167748
Publication date
Jul 10, 2008
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Application
Pulsed mass flow delivery system and method
Publication number
20070039549
Publication date
Feb 22, 2007
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Pulsed mass flow delivery system and method
Publication number
20070039550
Publication date
Feb 22, 2007
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Pulsed mass flow delivery system and method
Publication number
20070042508
Publication date
Feb 22, 2007
MKS Instruments, Inc.
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vaporizer and method of vaporizing a liquid for thin film delivery
Publication number
20060207503
Publication date
Sep 21, 2006
Paul Meneghini
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Pulsed mass flow delivery system and method
Publication number
20060130744
Publication date
Jun 22, 2006
William R. Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Pulsed mass flow measurement system and method
Publication number
20060130755
Publication date
Jun 22, 2006
William R. Clark
G01 - MEASURING TESTING
Information
Patent Application
Pulsed mass flow delivery system and method
Publication number
20050223979
Publication date
Oct 13, 2005
Ali Shajii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Flow measurement calibration
Publication number
20050217346
Publication date
Oct 6, 2005
Siddharth P. Nagarkatti
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for pressure fluctuation insensitive mass flow...
Publication number
20040256003
Publication date
Dec 23, 2004
Ali Shajii
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for protecting a pneumatic control system from ingested cont...
Publication number
20040250859
Publication date
Dec 16, 2004
James M. Poulin
B24 - GRINDING POLISHING
Information
Patent Application
FLOW CONTROL VALVE ASSEMBLY
Publication number
20010048089
Publication date
Dec 6, 2001
WILLIAM R. CLARK
G05 - CONTROLLING REGULATING