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Process for imaging of photoresist
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Patent number 6,277,546
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Issue date Aug 21, 2001
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International Business Machines Corporation
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Gregory Breyta
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Composition for photoimaging
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Patent number 6,180,317
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Issue date Jan 30, 2001
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International Business Machines Corporation
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Robert David Allen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Composition for photoimaging
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Patent number 5,747,223
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Issue date May 5, 1998
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International Business Machines Corporation
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Robert D. Allen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Composition for photo imaging
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Patent number 5,264,325
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Issue date Nov 23, 1993
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International Business Machines Corporation
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Robert D. Allen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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