William DiVergilio

Person

Green Bay, WI, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical heat source with restricted wavelengths for process heating
- Patent number 9,842,752
- Issue date Dec 12, 2017
- Axcelis Technologies, Inc.
- David Bernhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-based material modification using a plasma source with magne...
- Patent number 9,653,253
- Issue date May 16, 2017
- Advanced Ion Beam Technology, Inc.
- William Divergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF coupled plasma abatement system comprising an integrated power o...
- Patent number 8,932,430
- Issue date Jan 13, 2015
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for beam current modulation by ion source parameter modulation
- Patent number 8,803,110
- Issue date Aug 12, 2014
- Axcelis Technologies, Inc.
- Michael A. Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma electron flood
- Patent number 8,760,054
- Issue date Jun 24, 2014
- Axcelis Technologies. Inc.
- William DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heated rotary seal and bearing for chilled ion implantation system
- Patent number 8,692,215
- Issue date Apr 8, 2014
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced low energy ion beam transport in ion implantation
- Patent number 8,237,135
- Issue date Aug 7, 2012
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source/multimode ion source
- Patent number 8,193,513
- Issue date Jun 5, 2012
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with adjustable aperture
- Patent number 8,089,052
- Issue date Jan 3, 2012
- Axcelis Technologies, Inc.
- Daniel Tieger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double plasma ion source
- Patent number 7,947,966
- Issue date May 24, 2011
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wide area radio frequency plasma apparatus for processing multiple...
- Patent number 7,845,310
- Issue date Dec 7, 2010
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma electron flood for ion beam implanter
- Patent number 7,800,083
- Issue date Sep 21, 2010
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elevated temperature RF ion source
- Patent number 7,750,314
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Segmented resonant antenna for radio frequency inductively coupled...
- Patent number 7,748,344
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for rapidly switching off an ion beam
- Patent number 7,589,333
- Issue date Sep 15, 2009
- Axcelis Technologies, Inc.
- Michael A. Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine based cleaning of an ion source
- Patent number 7,531,819
- Issue date May 12, 2009
- Axcelis Technologies, Inc.
- William F. DiVergilio
- B08 - CLEANING
Information Patent Grant
Ion implanter with ionization chamber electrode design
- Patent number 7,453,074
- Issue date Nov 18, 2008
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam scanning control methods and systems for ion implantation...
- Patent number 7,078,707
- Issue date Jul 18, 2006
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unipolar electrostatic quadrupole lens and switching methods for ch...
- Patent number 6,949,895
- Issue date Sep 27, 2005
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamping and de-clamping semiconductor wafers on an electrostatic c...
- Patent number 6,947,274
- Issue date Sep 20, 2005
- Axcelis Technologies, Inc.
- Peter L. Kellerman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Thin magnetron structures for plasma generation in ion implantation...
- Patent number 6,879,109
- Issue date Apr 12, 2005
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for ion beam containment in an ion beam guide
- Patent number 6,759,665
- Issue date Jul 6, 2004
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and coaxial inductive coupler for ion implantation system
- Patent number 6,664,548
- Issue date Dec 16, 2003
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated resonator and amplifier system
- Patent number 6,653,803
- Issue date Nov 25, 2003
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for improved ion acceleration in an ion implan...
- Patent number 6,653,643
- Issue date Nov 25, 2003
- Axcelis Technologies, Inc.
- Kourosh Saadatmand
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Slit double gap buncher and method for improved ion bunching in an...
- Patent number 6,635,890
- Issue date Oct 21, 2003
- Axcelis Technologies, Inc.
- Kourosh Saadatmand
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for improved ion bunching in an ion implantati...
- Patent number 6,583,429
- Issue date Jun 24, 2003
- Axcelis Technologies, Inc.
- Kourosh Saadatmand
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Waveguide for microwave excitation of plasma in an ion beam guide
- Patent number 6,541,781
- Issue date Apr 1, 2003
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for microwave excitation of plasma in an ion beam...
- Patent number 6,414,329
- Issue date Jul 2, 2002
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated power oscillator RF source of plasma immersion ion impla...
- Patent number 6,305,316
- Issue date Oct 23, 2001
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Laser-Induced Borane Production for Ion Implantation
- Publication number 20160175804
- Publication date Jun 23, 2016
- Axcelis Technologies, Inc.
- William Davis Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA-BASED MATERIAL MODIFICATION USING A PLASMA SOURCE WITH MAGNE...
- Publication number 20150255242
- Publication date Sep 10, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- William DIVERGILIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEAT SOURCE WITH RESTRICTED WAVELENGTHS FOR PROCESS HEATING
- Publication number 20150037983
- Publication date Feb 5, 2015
- David Bernhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20130305989
- Publication date Nov 21, 2013
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source
- Publication number 20130305988
- Publication date Nov 21, 2013
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF Coupled Plasma Abatement System Comprising an Integrated Power O...
- Publication number 20120279657
- Publication date Nov 8, 2012
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA ELECTRON FLOOD
- Publication number 20120187842
- Publication date Jul 26, 2012
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Post Implant Wafer Heating Using Light
- Publication number 20110291022
- Publication date Dec 1, 2011
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM
- Publication number 20110291023
- Publication date Dec 1, 2011
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20110108058
- Publication date May 12, 2011
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE...
- Publication number 20110036500
- Publication date Feb 17, 2011
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION
- Publication number 20100181499
- Publication date Jul 22, 2010
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH ADJUSTABLE APERTURE
- Publication number 20090266997
- Publication date Oct 29, 2009
- Axcelis Technologies, Inc.
- Daniel Tieger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOUBLE PLASMA ION SOURCE
- Publication number 20090114841
- Publication date May 7, 2009
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER
- Publication number 20090114815
- Publication date May 7, 2009
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE/MULTIMODE ION SOURCE
- Publication number 20090032728
- Publication date Feb 5, 2009
- Axcebs Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEVATED TEMPERATURE RF ION SOURCE
- Publication number 20090032727
- Publication date Feb 5, 2009
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wide area radio frequency plasma apparatus for processing multiple...
- Publication number 20080138992
- Publication date Jun 12, 2008
- William F. DiVergilio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods for beam current modulation by ion source parameter modulation
- Publication number 20080078957
- Publication date Apr 3, 2008
- Axcelis Technologies, Inc.
- Michael A. Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for rapidly switching off an ion beam
- Publication number 20080078955
- Publication date Apr 3, 2008
- Axcelis Technologies, Inc.
- Michael A. Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluorine based cleaning of an ion source
- Publication number 20070137671
- Publication date Jun 21, 2007
- Axcelis Technologies, Inc.
- William F. DiVergilio
- B08 - CLEANING
Information Patent Application
Ion implanter with ionization chamber electrode design
- Publication number 20070125965
- Publication date Jun 7, 2007
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Segmented resonant antenna for radio frequency inductively coupled...
- Publication number 20070044717
- Publication date Mar 1, 2007
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SCANNING CONTROL METHODS AND SYSTEMS FOR ION IMPLANTATION...
- Publication number 20060145096
- Publication date Jul 6, 2006
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Segmented resonant antenna for radio frequency inductively coupled...
- Publication number 20050098117
- Publication date May 12, 2005
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPING AND DE-CLAMPING SEMICONDUCTOR WAFERS ON AN ELECTROSTATIC C...
- Publication number 20050052817
- Publication date Mar 10, 2005
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Unipolar electrostatic quadrupole lens and switching methods for ch...
- Publication number 20050045835
- Publication date Mar 3, 2005
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin magnetron structures for plasma generation in ion implantation...
- Publication number 20040227470
- Publication date Nov 18, 2004
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source and coaxial inductive coupler for ion implantation system
- Publication number 20030205680
- Publication date Nov 6, 2003
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved ion bunching in an ion implantati...
- Publication number 20030038253
- Publication date Feb 27, 2003
- Kourosh Saadatmand
- H01 - BASIC ELECTRIC ELEMENTS

William DiVergilio

Person

Patents Grantslast 30 patents

Optical heat source with restricted wavelengths for process heating

Plasma-based material modification using a plasma source with magne...

RF coupled plasma abatement system comprising an integrated power o...

Methods for beam current modulation by ion source parameter modulation

Microwave plasma electron flood

Heated rotary seal and bearing for chilled ion implantation system

Enhanced low energy ion beam transport in ion implantation

Hybrid ion source/multimode ion source

Ion source with adjustable aperture

Double plasma ion source

Wide area radio frequency plasma apparatus for processing multiple...

Plasma electron flood for ion beam implanter

Elevated temperature RF ion source

Segmented resonant antenna for radio frequency inductively coupled...

Methods for rapidly switching off an ion beam

Fluorine based cleaning of an ion source

Ion implanter with ionization chamber electrode design

Ion beam scanning control methods and systems for ion implantation...

Unipolar electrostatic quadrupole lens and switching methods for ch...

Clamping and de-clamping semiconductor wafers on an electrostatic c...

Thin magnetron structures for plasma generation in ion implantation...

Method and system for ion beam containment in an ion beam guide

Ion source and coaxial inductive coupler for ion implantation system

Integrated resonator and amplifier system

Method and apparatus for improved ion acceleration in an ion implan...

Slit double gap buncher and method for improved ion bunching in an...

Method and apparatus for improved ion bunching in an ion implantati...

Waveguide for microwave excitation of plasma in an ion beam guide

Method and system for microwave excitation of plasma in an ion beam...

Integrated power oscillator RF source of plasma immersion ion impla...

Patents Applicationslast 30 patents

Laser-Induced Borane Production for Ion Implantation

PLASMA-BASED MATERIAL MODIFICATION USING A PLASMA SOURCE WITH MAGNE...

OPTICAL HEAT SOURCE WITH RESTRICTED WAVELENGTHS FOR PROCESS HEATING

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source

RF Coupled Plasma Abatement System Comprising an Integrated Power O...

MICROWAVE PLASMA ELECTRON FLOOD

Post Implant Wafer Heating Using Light

HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE...

ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION

ION SOURCE WITH ADJUSTABLE APERTURE

DOUBLE PLASMA ION SOURCE

PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER

HYBRID ION SOURCE/MULTIMODE ION SOURCE

ELEVATED TEMPERATURE RF ION SOURCE

Wide area radio frequency plasma apparatus for processing multiple...

Methods for beam current modulation by ion source parameter modulation

Methods for rapidly switching off an ion beam

Fluorine based cleaning of an ion source

Ion implanter with ionization chamber electrode design

Segmented resonant antenna for radio frequency inductively coupled...

ION BEAM SCANNING CONTROL METHODS AND SYSTEMS FOR ION IMPLANTATION...

Segmented resonant antenna for radio frequency inductively coupled...

CLAMPING AND DE-CLAMPING SEMICONDUCTOR WAFERS ON AN ELECTROSTATIC C...

Unipolar electrostatic quadrupole lens and switching methods for ch...

Thin magnetron structures for plasma generation in ion implantation...

Ion source and coaxial inductive coupler for ion implantation system

Method and apparatus for improved ion bunching in an ion implantati...