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William Francis Drislane
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Pepperell, MA, US
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last 30 patents
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Patent Grant
System and method of fast ambient switching for rapid thermal proce...
Patent number
6,753,506
Issue date
Jun 22, 2004
Axcelis Technologies
Yong Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
System and method of fast ambient switching for rapid thermal proce...
Publication number
20030038127
Publication date
Feb 27, 2003
Yong Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...